EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS
zzzQ150T Plus Turbomolecular Pumped Coater
QUICK OVERVIEW
The Q150T Plus is optimized for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 mbar. This enables the sputtering of oxidizing metals, which have a lower grain size suitable for high- resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.
Typical uses
Sputter coating of noble and oxidizing metals using the Q150T S Plus & Q150T ES Plus:
Recommended for magnifications:: • Up to x 50k using Au, Au/Pd • Up to x 100k using Pt
• above x 100k using Cr, Ir(optional)
Ideal for thin film applications such as coating with ITO, W, Al, Zn.
KEY FEATURES z New touch and swipe capacitive screen z USB port for upgrades and download of process log files z Multiple-user profiles can be set up on one machine z New software sorts recipes per user according to recent use z 16GB of memory can store more than 1000 recipes z New multi-color LED visual status indicator z Capable of achieving vacuum of 5 x 10-5 mbar
PRODUCT DESCRIPTION The Q150T Plus is available in three configurations:
• Q150T S Plus – An automatic sputter coater for non-oxidizing metals. Sputtering targets include; Cr, Ir, W, ITO, Al. Other targets available.
• Q150T E Plus – An automatic carbon cord coater for SEM applications such as EDS and WDS. Metal evaporation/aperture cleaning option available.
• Q150T ES Plus – A combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds. Metal evaporation/aperture cleaning option available.
Improved Interface • Capacitive touch screen is more sensitive for ease of use
• User interface software has been extensively revised, using a modern smartphone-style interface
• Comprehensive context-sensitive help screen
• USB interface allows easy software updates and backing up/copying of recipe files to USB stick
• Process log files can be exported via USB port in .csv format for analysis in Excel or similar. Log files include date, time and process parameters.
• 16GB of flash memory can store more than 1000 recipes • Dual-core ARM processor for a fast, responsive display
Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use. Intelligent system logic automatically detects which insert is in place and
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Recommended applications for Q150 T Plus: • High-resolution magnification SEM • Protective platinum layers for FIB • R&D of corrosion-, friction-, and wear protective layers • Protective layers on medical devices • BSE imaging • EDX, WDS, EBSD analysis • Carbon coating of replicas
These products are for Research Use Only. displays the appropriate operating settings and controls for that process.
System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.
Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.
Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.
Controlled ramped carbon rod evaporation
Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of "sparking" that is a common feature of less advanced coaters.
For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.
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