EMS Equipment & Accessories

EQUIPMENT & ACCESSORIES CATALOG EDITION V REPLACEMENT PARTS

zzz Replacement Parts & Supplies for Older EMS Equipment Models

EMS 450 Carbon Coater 91014

"L" Gaskets to suit 165mm (6") cylinder EMS 450, 500, 550

92045

91011 91012 91030 91031

EMS 50 Water Chiller

Replacement Targets 91010

Gold Target

Gold/Palladium Target Platinum Target Gold Targets*

(*Recommended change as set of three)

Head inserts and glow discharge 4511

4512 4513

4514 4515

4516 4517

zzz Replacement Parts & Supplies for Q150R Plus Rotary Pumped Coater Carbon fiber cord – high purity – 1m

Additional sputter insert for quick metal change (R E and R ES only). Note: this is an entire sputtering assembly – individual noble metal targets can also be purchased

Carbon rod evaporation insert for 3.05 mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05 mm Ø carbon rod

each each

Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted each Additional standard glass chamber assembly

Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens

Rotating vacuum spigot allows more convenient connectionof the vacuum hose to the rear of the Q150R when bench depth is limited

Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This "modification" is used to measure and control the thickness of material deposited

4518

13530 11880 1371

Spare quartz crystal Standard coating shield assembly

Extended height coating shield assembly Platinum coating vacuum hose assembly

Specimen stages

All rotating stages have variable rotation of between 8 and 20 rpm. 4519

4520 4521 4522 23850 44

50 mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Has six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm

90 mm Ø rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm

Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm

Flat rotation specimen stage for 100 mm/4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm Tilt stage sub-assembly 4"

each each

Carbon Supplies 4538 4539 4540 4541 4542 4543

4544 4546

12097

Carbon fiber cord – high purity – 5m Carbon fiber cord – standard grade – 1m Carbon fiber cord – standard grade – 10m Carbon fiber cord – standard grade – 100m

Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10

Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10)

Manual rod shaper for 3.05 mm Ø carbon rods Wedge Tool

each each each each each

Sputtering Targets 4523 4524 4525 4526 4527 4528 4529 4530 4531 4532 4533 4534 4535 4536 4537

Spare Kits 4547

each each each

each each

4548 4549

57 mm Ø x 0.1 mm Gold 57 mm Ø x 0.2 mm Gold 57 mm Ø x 0.3 mm Gold

57 mm Ø x 0.1 mm Gold/Palladium (80/20) 57 mm Ø x 0.2 mm Gold/Palladium (80/20) 57 mm Ø x 0.3 mm Gold/Palladium (80/20) 57 mm Ø x 0.1 mm Platinum 57 mm Ø x 0.2 mm Platinum 57 mm Ø x 0.3 mm Platinum 57 mm Ø x 0.1 mm Nickel 57 mm Ø x 0.1 mm Silver 57 mm Ø x 0.1 mm Palladium 57 mm Ø x 0.1 mm Copper

57 mm Ø x 0.1 mm Platinum/Palladium (80/20) 57 mm Ø x 0.3 mm Platinum/Palladium (80/20)

Two-year spares kit for Q150R S

Includes: 57 mm Ø x 0.1 mm gold target, standard glass chamber assembly quartz crystals, O-rings Two-year spares kit for Q150R E

Includes: carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs Two-year spares kit for Q150R ES

Includes: 57 mm Ø x 0.1 mm gold target, carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs

kit kit kit

EMS 500, 550, 575T EMS 500, 550, 575T EMS 500, 550, 575T EMS 650, 675X

Gold/Palladium Targets* EMS 650, 675X

each each each x3 x3

Replacement Parts 91033

1 pair

EMS 500, 550, 575, 650 and 675 Sputter Coaters and EMS 975 and 975S Large Chamber Turbo Evaporator

91034 Glass Cylinder 225mm (8") EMS 650, 675X, 975, 975S

"L" Gaskets to suit 225mm (8") cylinder EMS 650, 675X, 975, 975S

Replacement Source 91077

Carbon Rods EMS 975, 975S (6.15mm Dia.),

91085 91086 90032

“L” Gasket to suit 165mm (6") cylinder (1) pair Desiccant Containers (set of 3) Slushing Pot Copper Discs

each 1 pair 12/pack

Replacement Parts for EMS 750 and 775 Freeze Driers 91014

each 3/pk each each

each each each each each

10/pk 10/pk

each each

each each each each each each each each each each each each each each each

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