EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS


ORDERING INFORMATION zzzQ150R Plus (continued)


Q150R S Plus 4500


Q150R S Plus Fully automatic, capacitive touch- screen controlled rotary-pumped sputter coater with status LED indicator. Including: quick-release sputter insert, one 57 mm diameter x 0.1 mm gold target, and 50 mm diameter rotating specimen stage.


Q150R E Plus 4503


Q150R E Plus Fully automatic, capacitive touch- screen controlled rotary pumped carbon fiber evaporation coater with status LED indicator. Including: quick-release carbon fiber insert for evaporation of carbon cord, carbon fiber cord, and 50 mm diameter rotating specimen stage.


Q150R ES Plus 4507


Q150R ES Plus Fully automatic, capacitive touch- screen controlled rotary pumped sputter coater and carbon evaporator with status LED indicator. Including: quick release sputter insert, one 57 mm diameter x 0.1 mm gold target, and carbon fiber evaporation coater, including quick-release carbon fiber insert for evaporation of carbon cord*, and 50 mm diameter rotating specimen stage.


*Coating inserts are interchangeable and can be swapped in seconds. The intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.


Options and Accessories


Rotary pump requirements – order separately 91003


5m3


Head inserts and glow discharge 4511


4512 4513


4514 4515


4516 4517


hr two-stage Pfeiffer Duo 6 rotary pump with oil mist filter


Additional sputter insert for quick metal change (R E and R ES only). Note: this is an entire sputtering assembly – individual noble metal targets can also be purchased


Carbon rod evaporation insert for 3.05 mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05 mm Ø carbon rod


each Specimen stages


All rotating stages have variable rotation of between 8 and 20 rpm. 4519


4520 4521 4522 23850


50 mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Has six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm


90 mm Ø rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm


Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for 15 mm or 6.5 mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm


Flat rotation specimen stage for 100 mm/4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm Tilt stage sub-assembly 4"


each each each


each each


For our complete selection of specimen stages, please see the Specimen Stage Selection Guide on page 49 >>>>


Carbon Supplies 4538 4539 4540 4541 4542 4543


4544 4546


12097 each each


Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted each Additional standard glass chamber assembly


Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens


Rotating vacuum spigot allows more convenient connectionof the vacuum hose to the rear of the Q150R when bench depth is limited


Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This "modification" is used to measure and control the thickness of material deposited


4518


13530 11880 1371


Spare quartz crystal Standard coating shield assembly


Extended height coating shield assembly Platinum coating vacuum hose assembly


each each


Carbon fiber cord – high purity – 1m Carbon fiber cord – high purity – 5m Carbon fiber cord – standard grade – 1m Carbon fiber cord – standard grade – 10m Carbon fiber cord – standard grade – 100m


Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10


Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10)


Manual rod shaper for 3.05 mm Ø carbon rods Wedge Tool


Sputtering Targets 4523 4524 4525 4526 4527 4528 4529 4530 4531 4532 4533 4534 4535 4536 4537


Spare Kits 4547


each each each each each


4548 4549


57 mm Ø x 0.1 mm Gold 57 mm Ø x 0.2 mm Gold 57 mm Ø x 0.3 mm Gold


57 mm Ø x 0.1 mm Gold/Palladium (80/20) 57 mm Ø x 0.2 mm Gold/Palladium (80/20) 57 mm Ø x 0.3 mm Gold/Palladium (80/20) 57 mm Ø x 0.1 mm Platinum 57 mm Ø x 0.2 mm Platinum 57 mm Ø x 0.3 mm Platinum 57 mm Ø x 0.1 mm Nickel 57 mm Ø x 0.1 mm Silver 57 mm Ø x 0.1 mm Palladium 57 mm Ø x 0.1 mm Copper


57 mm Ø x 0.1 mm Platinum/Palladium (80/20) 57 mm Ø x 0.3 mm Platinum/Palladium (80/20)


Two-year spares kit for Q150R S


Includes: 57 mm Ø x 0.1 mm gold target, standard glass chamber assembly quartz crystals, O-rings Two-year spares kit for Q150R E


Includes: carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs Two-year spares kit for Q150R ES


Includes: 57 mm Ø x 0.1 mm gold target, carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs


23


each each each each each


10/pk 10/pk


each each


each each each each each each each each each each each each each each each


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