EQUIPMENT & ACCESSORIES CATALOG EDITION V LARGE CHAMBER SPUTTER COATERS zzzQ300T ES Plus (continued)
Q300T ES Plus has a 150 mm wafer capability
SPECIFICATIONS Instrument Case
Weight
Packed Dimensions Work Chamber
Display User Interface Specimen Stage
A flat adjustable stage capable of accepting either 4” or 6” wafers is mounted on a swinging arm stage, which rotates the stage under the targets to optimise coating. Rotation speed is variable from 14rpm to 38rpm
Ultimate Vacuum Sputter Vacuum Range
5 x 10-5 5x10-2
mbar* to 5x10-3 mbar*
*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas Sputter Target
Disc-style 57 mm Ø. A 0.5 mm thick chromium (Cr) is fitted as standard.
Visual Status Indicator
A large status multi-color indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance.
The indicator LED shows the following states: • Initialization • Process running • Idle
• Coating in progress • Process completed
• Process ended in fault condition
Audio indication also sounds on completion of the process. Services Gases
process gas argon, 99.999% Nominal 5 psi
590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm) 36 kg (packed: 59kg)
730 mm W x 630 mm D x 690 mm H
Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
10879 12899
ORDERING INFORMATION Q300T ES Plus
Large Chamber, Turbo-Pumped Sputter Coater/Carbon Coater, Chromium (Cr) sputter target is fitted as standard.
Rotary pump requirements (needs to be ordered separately) 91003
6548 6550-A
Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter XDS 5 Scroll Pump Diaphragm pump.
A "dry" alternative to the standard 91003 oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter
Options and Accessories 3290
Sputter targets
Note: The Q300T ES Plus is fitted as standard with three 0.3 mm chromium (Cr) targets (3417). Other optional targets are available (three required): 3410 3411 3412 3413 3414 3415 3416 3417 3418 3419 3420 3422 3423 3424 3425 3426 3427 3428 3429 3430 3431 3432 3433 3434 3435
57mm Ø x 0.1mm Gold
57mm Ø x 0.1mm Gold/Palladium (80/20) 57mm Ø x 0.1mm Platinum 57mm Ø x 0.1mm Nickel 57mm Ø x 0.1mm Silver 57mm Ø x 0.1mm Palladium 57mm Ø x 0.1mm Copper 57mm Ø x 0.3mm Chromium 57mm Ø x 0.5mm Tungsten 57mm Ø x 1.5mm Chromium 57mm Ø x 0.2mm Tungsten 57mm Ø x 0.1mm Aluminum
57mm Ø x 0.1mm Platinum/Palladium (80/20) 57mm Ø x 1.5mm Titanium
57mm Ø x 0.3mm Platinum/Palladium (80/20) 57mm Ø x 0.3mm Gold
57mm Ø x 0.3mm Gold/Palladium (80/20) 57mm Ø x 0.3mm Platinum 57mm Ø x 0.5mm Titanium 57mm Ø x 0.1mm Iron 57mm Ø x 0.3mm Iridium 57mm Ø x 0.1mm Cobalt 57mm Ø x 0.1mm Tin
3435-5 3436 3437
57mm Ø x 0.1mm Molybdenum 57mm Ø x 0.3mm Magnesium 57mm Ø x 0.5mm Magnesium 57mm Ø x 0.1mm Tantalum
57mm Ø x 3mm Indium Tin Oxide (90/10)
each each each each each each each each each each each each each each each each each each each each each each each each each each each each
39
Film thickness monitor (FTM) attachment. Carbon Rod Insert & Accessory Kit Slide Coater Assembly
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