EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS


zzzQ150 GB Turbo-Pumped Sputter Coater/ Carbon Coater — For Glove Box


QUICK OVERVIEW


The Q150 GB is a modular glove box version of the highly successful Q150T ES bench top turbomolecular-pumped coating system - suitable for SEM, TEM and many thin-film applications. The Q150 GB comes as standard with sputtering and carbon rod evaporation inserts and a rotating specimen stage. Options include a metal evaporation insert, glow discharge, a film thickness monitor (FTM), aperture cleaning insert and special stages to suit a range of specimen types.


FEATURES z Modular construction for mounting in glove boxes z Integral glove box pressure monitoring z Remote operation from a touch screen control panel z Metal sputtering and carbon evaporation in one system z Fine grain sputtering for advanced high resolution FE-SEM applications


z High vacuum turbo pumping - allows sputtering of a wide range oxidising and non-oxidising metals


z High vacuum carbon rod coating - ideal for SEM and TEM carbon coating applications (car- bon fiber available as an option)


z Advanced "anti-stick" carbon rod evaporation gun – simple operation, reproducible results z Control of evaporation current profile - ensures consistently reproducible carbon films z Precise thickness control using the film thickness monitor option z Fully automatic touch screen control – rapid data input, simple operation z Multiple, customer defined coating schedules can be stored - ideal for multi-user laboratories


z Automatic vacuum control which can be pre-programmed to suit the process and material – no manual needle valve to adjust


z "Intelligent" recognition of system - automatically detects the type of coating insert fitted z Easy-to-change, drop-in style specimen stages (flat rotation stage as standard)


z Vacuum shut down feature - leaves the process chamber under vacuum when not in use - improved vacuum performance


z Thick film capabilities - up to 60 minutes sputtering time without breaking vacuum


z Power Factor Correction - complies with the current legislation (CE certification) - efficient use of power means reduced running costs


z Three-year warranty PRODUCT DESCRIPTION


The Q150 GB is single platform for sputtering and carbon rod evaporation. Metal evaporation using filament or boat sources is possible using an optional insert.


Depending upon user preference, the Q150 GB can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), or a high vacuum carbon coater suitable for SEM and transmission electron microscopy (TEM). The flexibility of the system can be further expanded using a range of optional accessories.


The Q150 GB can rapidly sputter a wide selection of oxidising and non-oxidising metals making it ideal for many thin film applications.


The Q150 GB has an integral turbomolecular pump and additionally requires a suitable rotary pump or dry pump to "back" the turbomolecular pump (see Option and Accessories).


Flexible modular design


A modular design enables the vacuum chamber to be mounted through the base of the glove box or - when modification to the glove box floor is not possible - inside the glove box (optional feedthroughs are required).


A separate power supply housed in a rugged case is designed to be floor mounted and can be positioned conveniently beneath the glove box or bench. The touch screen user interface is housed in a robust stainless steel case and can be positioned outside of the glove box environment, if preferred.


32 Q150 GB mounted in a glove box


Options for glove box mounting: Vacuum module mounted in the floor of the glove box


A cut-out is made in the floor of the glove box and the vacuum chamber fitted and sealed with the gasket supplied. External connections from the floor mounted power supply, vacuum pump and argon gas can then be made directly to the chamber.


OR


Vacuum module placed inside the glove box


The chamber assembly is placed inside the glove box and the power supply, vacuum pump and argon gas connections are made through two KF40 feedthroughs in the rear of the glove box.


Note: each Q150 GB is supplied with an accessory/configuration kit to suit either internally or externally mounted vacuum chambers. Additional kits can be designed on a case-by-case basis to allow the system to be adapted to various manufacturers' glove boxes. Please contact EMS for more details.


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