EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS
Selection Guide: Q Series Sputter Coaters, SEM/TEM Carbon Coaters If you are not sure which coating system suits your application’s requirements please don’t hesitate to contact us for advice.
Q150 R Plus High (Turbo) or Low (Rotary) Model
Q150R S Plus
Q150R E Plus
Q150R ES Plus
Q150T S Plus
Q150T E Plus
Q150T ES Plus
Q150V S Plus
Q150V E Plus
Q150V ES Plus
Q150 GB
Q300TT Plus
Q300TD Plus
Capable of Pumped Vacuum Achieving Vacuum
Rotary Turbo 2 x 10-3 5 x 10-5 √
√ √
√ √ √
√ √ √
√ √
√ √ √
√ √ √
√ √ √
√ √
√ √ √
√ √ √
√ √
√ √ √
1 x 10-6
Sputtering Metal Types
Non- √ √ √ √ √ √ √ √ √ √ √ √ √ √ √ √ √ √ √
√ √
√
option option
option
√ √
√
√ √
√ √
option option
√ √
Coating Types Metal
Oxidising Oxidising Sputtering Carbon Evaporation SEM TEM √
√ √
√ √
√ √
option option option option option option option
150mm 150mm 150mm
150mm 150mm 150mm
150mm 150mm 150mm
150mm 300mm
100mm 100mm 100mm
100mm 100mm 100mm
100mm 100mm 100mm
100mm 200mm
W-SEM W-SEM W-SEM
W-SEM FE-SEM W-SEM FE-SEM W-SEM FE-SEM
FE-SEM FE-SEM,
Carbon TEM Grids
W-SEM FE-SEM
W-SEM FE-SEM
√ √ √ √ √ √ 300mm
100mm option to 150mm
W-SEM FE-SEM Thin Film
Rotary pumped
coaters for W-SEM specimens up to 100 mm dia.
Turbo pumped
coaters for W-SEM, and FE-SEM
specimens up to 100 mm dia.
Turbo pumped
high-vacuum coaters, for FE-SEM
and TEM grids, specimens up to 100 mm dia.
Glove box coater.
based on the Q150T ES Plus
As the Q150T S Plus,
but with capability to take larger specimens
Dual head coater, for multi-layer
coating applications of two metals
Carbon - SEM, TEM Films
Glow Discharge Diameter
Q150 T Plus
Q150V Plus Max. Chamber Specimen Typical Diameter Application Summary
Q150 GB
Q300TT Plus 18
Q300T ES
Q300TD Plus
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