EQUIPMENT & ACCESSORIES CATALOG EDITION IV LARGE CHAMBER SPUTTER COATERS


zzzQ300T T Plus (continued)


SPECIFICATIONS Instrument Case


Weight


Packed Dimensions Work Chamber


Display User Interface Specimen Stage


A flat rotation stage for 6”(150mm) and 8” (200mm) wafers is fitted as standard.


A rotating/tilt stage and the ‘rota cota’ rotary tilt stage are also options Vacuum Rotary Pump


4 m3 Turbo Pump


Vacuum Measurement Ultimate Vacuum


Sputter Vacuum Range Processes


Sputter Deposition Current Visual Status Indicator


Single target: 1 - 140mA All targets: 60 - 420mA


A large status multi-color indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance.


The indicator LED shows the following states: • Initialization • Process running • Idle


• Coating in progress • Process completed


• Process ended in fault condition


Audio indication also sounds on completion of the process. Services Gases


process gas argon, 99.999% Nominal 5 psi


Sea mineral sample 3nm Cr, Mag x 25k


/hr, two stage rotary pump with oil mist filter for the 300T T Plus Internally mounted 70L/sec air cooled


Pirani gauge as standard, full range gauge available as an option 5 x 10-5 5x10-2


mbar* to 5x10-3 mbar*


*Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas


10nm Au on Sugar


590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm) 36 kg (packed: 59kg)


730 mm W x 630 mm D x 690 mm H


Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High


115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch color display


Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due


38


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44  |  Page 45  |  Page 46  |  Page 47  |  Page 48  |  Page 49  |  Page 50  |  Page 51  |  Page 52  |  Page 53  |  Page 54  |  Page 55  |  Page 56  |  Page 57  |  Page 58  |  Page 59  |  Page 60  |  Page 61  |  Page 62  |  Page 63  |  Page 64  |  Page 65  |  Page 66  |  Page 67  |  Page 68  |  Page 69  |  Page 70  |  Page 71  |  Page 72  |  Page 73  |  Page 74  |  Page 75  |  Page 76