EQUIPMENT & ACCESSORIES CATALOG EDITION IV LARGE CHAMBER SPUTTER COATERS zzzQ300T ES Large Chamber Turbo-Pumped Evaporator/Sputter Coater (continued)
Sputter coating for high resolution FE-SEM and thin film applications
The advance design of sputtering head, power supply and system control allows sputtering of both oxidizing and non-oxidizing (noble) metals for thin film applications and for scanning electron microscopy (SEM) coating. The full range of target materials available is extensive and detailed in the Ordering Information section.
For sputtering applications where thick films are required, then the Q300T ES can operate for up to 60 minutes.
High vacuum carbon evaporation for SEM and TEM
The carbon rod evaporation insert allows high quality carbon films to be deposited over a radius of up to 4"/102 mm.
The Q300T ES uses controlled ramped carbon rod evaporation to ensure optimum control of the process and quality of results (with or without the optional film thickness
range vacuum measurement gauge is included. Typically ultimate vacuums of around 5 x 10-5 mbar can be expected in a clean system after pre- pumping with dry nitrogen gas. For details of pumping options, see Ordering Information.
Touch-screen control and stored recipes
Sputtering insert
At the operational heart of the Q300T ES is a color touch screen which allows users to rapidly enter and store their own process data. A range of typical sputtering and evaporation profiles are pre-installed. The Q300T ES uses an 'Intelligent' recognition system that automatically detects the type of coating insert fitted and
"becomes" either an evaporator, carbon coater or sputter coater. Vacuum chamber and specimen stages
The Q300T ES is presented in a custom-molded, one-piece case allowing easy servicing access. The case houses all the working components and includes an automatic bleed control that ensures optimum vacuum conditions during sputtering.
The vacuum chamber has an internal diameter of 283 mm/11" and comes with an integral safety guard. The vacuum shutdown option enhances vacuum performance by allowing the chamber vacuum to be maintained when the coater is not in use.
Carbon rod evaporation insert
measurement system). In addition the quality of the resulting carbon films is enhanced by the eradication of "sparking" which is a common problem with less advanced coating systems.
High vacuum turbomolecular pumping and vacuum measurement
The Q300T ES is fitted with an internally mounted 70 L/s turbomolecular pump backed by a 5m3 hr two-stage rotary pump (order separately). A full
Sun and planet-style stage with conductance film thickness monitor
A variable speed rotary specimen stage is fitted as standard and accommodates specimens up to 4"/100 mm in diameter. For details of other stages, see Ordering Information.
Pumping Requirement
A suitable rotary vacuum pump is required. The Pfeiffer DUO 6 5m3/hr two-stage rotary vacuum pump (91003) is ideal for this purpose. Dry pumping alternatives are also available. See Ordering Information for more details.
41
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32 |
Page 33 |
Page 34 |
Page 35 |
Page 36 |
Page 37 |
Page 38 |
Page 39 |
Page 40 |
Page 41 |
Page 42 |
Page 43 |
Page 44 |
Page 45 |
Page 46 |
Page 47 |
Page 48 |
Page 49 |
Page 50 |
Page 51 |
Page 52 |
Page 53 |
Page 54 |
Page 55 |
Page 56 |
Page 57 |
Page 58 |
Page 59 |
Page 60 |
Page 61 |
Page 62 |
Page 63 |
Page 64 |
Page 65 |
Page 66 |
Page 67 |
Page 68 |
Page 69 |
Page 70 |
Page 71 |
Page 72 |
Page 73 |
Page 74 |
Page 75 |
Page 76
