EQUIPMENT & ACCESSORIES CATALOG EDITION V SPUTTER COATERS, SEM/TEM CARBON COATERS zzzTurboQ High-Vacuum Coating System (continued)


Specifications Enclosure


Dimensions Weight


Unit Weight


Packed Weight Instrument Size


Instrument Size with


Chamber Open Specimen Stage Short stage:


Tall stage: Chamber Size Ultimate Vacuum


Operational Vacuum Vacuum Gauge Range User Interface Supply Voltage


520mm (W) x 286mm (H) x 550mm (L) (+50mm on rear for cables) ~22kg


38 Kg (ES model) 54 Kg (ES model)


440mm (W) x 556mm (H) x 551mm (D) 440mm (W) x 860mm (H) x 551mm (D)


65mm (H) from chamber base, 50mm Ø diameter


145mm (H) from chamber base, 50mm Ø diameter


150mm Ø diameter, 220mm (H) 1 x 10-6 5 x 10-6


mbar mbar


1000 – 1 x 10-9 mbar


Touch screen color display 100V – 240V


Sputter Coater (TurboQ S and TurboQ ES) Sputter Target


Specimen Stage Deposition Current Deposition Rate Sputter Timer


Target Disc style, 57mm Ø diameter x 0.3mm (thickness). Cr target supplied as standard.


50mm Ø diameter rotating stage 1–150 mA


0.1–20 nm/min (e.g. for Au) 0–60 min


Evaporation Coater (TurboQ E and TurboQ ES) Evaporation Current (rod) Outgas Current Carbon Source


5–75A (dependent on process) 1–40A


3.2mm rods or carbon fiber Ordering Information


TurboQ E Includes: Tilt Stage Assembly, Film Thickness Monitor, Carbon Rods 3.05mm x 300mm 10/pk, Carbon Rod Insert & Accessory Kit, Glass Cylinder Assembly, Accessories Pack, Startup Kit


Cat No.


TURBOQE 10355 10879 3260


Description


Turbo-Pumped Carbon Evaporation Coater Carbon Fiber Insert Assembly & Accessories Carbon Rod Insert & Accessory Kit


Qty. each each


each Metal Evaporation & Aperture Clean Insert & Accessories each


TurboQ S Includes: 57mm Dia. X 0.5mm thick Chromium (Cr) Target, Tilt Stage Extended Height Assembly, Film Thickness Monitor (FTM) Assembly Extended Height, Sputter Insert Assembly, Glass Cylinder Assembly, Accessories Pack, Startup Kit


Cat No.


TURBOQS 4513 3210


Description


Turbo-Pumped Sputter Coater Glow Discharge Insert Assembly Sputter Insert Assembly


Qty. each each each


TurboQ ES Includes: 57mm Dia. X 0.5mm thick Chromium (Cr) Target, Tilt Stage Assembly, Stage Drive Shaft Extended Height, Film Thickness Monitor (FTM), FTM Assembly Extended Height, Stage Drive Shaft Extended Height, Carbon Rods 3.05mm x 300mm 10/pk, Carbon Rod Insert & Accessory Kit, Sputter Insert Assembly, Glass Cylinder Assembly, Accessories Pack, Startup Kit


Cat No. 10355


10879 3260 4513 3210


Description


TURBOQES Rotary-Pumped Sputter and Evaporation Coater Carbon Fiber Insert Assembly & Accessories Carbon Rod Insert & Accessory Kit


Qty. each each each


Metal Evaporation & Aperture Clean Insert & Accessories each Glow Discharge Insert Assembly Sputter Insert Assembly


each each


Rotary Pump Requirements — order separately Cat No. 91003


Description


Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter


Options & Spares — All TurboQ Models Cat No. 33888 27638 33465 11880 3240


Description TurboQ Service Kit


Glass chamber 6.5 OD x 220mm Glass cylinder assembly


Extended Height Coating Shield Tilt stage assembly


33814 3350


Electrospun Polyvinylidene fluoride (PVDF) nanofibers. The fibers were coated with 5 nm Pt.


33591 34338 34315 34321 34323 10362 33872 10359 11856


4500-15 10808 12305


Tilt stage extended height assembly Rota Cota stage assembly


Rota Cota stage extended height assembly 4" wafer stage assembly with gearbox


4" wafer stage extended height assembly with gearbox Slide stage assembly with gearbox


Slide stage extended height assembly with gearbox Film Thickness Monitor


Film Thickness Monitor, extended height Offset gearbox


14 Place sample stage assembly 9 Place coverslip stage assembly 8 Place stub stage assembly 4 place stub stage assembly


Qty. each


Qty. each each each each each each each each each each each each each each each each each each each


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