EQUIPMENT & ACCESSORIES CATALOG EDITION IV LARGE CHAMBER SPUTTER COATERS
zzzQ300T T Plus Triple Target, Large Chamber, Turbo-Pumped Sputter Coater
QUICK OVERVIEW
The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8"/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE- SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens.
Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head. For sequential coating, see the Q300T D Plus.
KEY FEATURES z Ultimate vacuum of 1x10-6
mbar or less possible
z New touch and swipe capacitive screen z USB port for upgrades and download of process log files z Multiple-use profiles can be set up on one machine
z New software sorts recipes per user according to recent use
z 16GB of memory can store more than 1000 recipes z New multi-color LED visual status indicator z Interchangeable stage options
z Three sputter heads for larger area deposition of different materials
PRODUCT DESCRIPTION Detachable chamber with built-in implosion guard
Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. Tall chamber option is available for improved uniformity for sputtering and to hold larger substrates.
Triple Target Sputtering System
The Q300T T Plus is fitted with three individual sputtering heads to ensure even deposition of individual large specimens or multiple specimens. For economical coating of small specimens, 'single target' mode can be selected. They are ideal coaters for the preparation of large specimens for examination by SEM, FEG-SEM. To ensure even deposition, the Q300T T Plus coaters are fitted with a rotating specimen stage and three individual magnetron target assemblies, which enhance the efficiency of the process by using low voltages.
Recommended applications for Q300T T Plus: • Wafer Inspection • Multiple sample preparation for SEM These products are for Research Use Only.
Multiple stage options
The Q300T T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and the rotation speed is variable between pre-set limits. Flat rotation stage for 200 mm/8" and 150 mm/6" wafers (fitted as standard).
Standard specimen stage
Triple sputtering head with automatic shutter open
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Triple sputtering head with automatic shutter closed
rotary planetary specimen stage (option)
Specimen stage for glass microscope slides (option)
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