EQUIPMENT & ACCESSORIES CATALOG EDITION V LARGE CHAMBER SPUTTER COATERS


What is... Carbon Evaporation?


The use of Carbon Evaporation is well known in Electron Microscopy for support films and replicas in TEM, and X-Ray Microanalysis and conducting coatings in SEM.


The films are continuous for thicknesses of 2nm (or 20 Angstroms) or more, and free of significant structure.


The most common form of deposition is from resistance heated carbon, or graphite rods, spectrographically pure. The rods are shaped to achieve a high current density at the point of contact of the rods with sufficient temperature being generated to cause the evaporation. At this point, the appearance being that of small, bright, glowing particles of carbon. To achieve the required vacuum condition of 1x 10-4


or better, requires the use of Diffusion or Turbo Molecular Pumps.


zzzQ300T ES Plus Large Chamber, Turbo-Pumped Sputter Coater/Carbon Coater


mbar,


DNA strands


QUICK OVERVIEW


The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 150mm. Ideal for high resolution SEM, large samples e.g Silicon Wafers, protective platinum layers for FIB, and carbon coating for elemental analysis and TEM


KEY FEATURES Pseudomonas fluorescens


z Capable of achieving vacuum of 5x10-⁵ mbar z Single sputter head allows coating of samples up to 150 mm Ø z Touch and swipe capacitive screen z USB port for upgrades and download of process log files z Multiple-user profiles can be set up on one instrument z 16GB of memory can store more than 1000 recipes z Multi-colour LED visual status indicator z 1 x Chromium target as standard z Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt z Capable of carbon rod evaporation (carbon fibre evaporation available as option)


Spectrin molecules


Recommended applications for Q300T ES Plus: • High resolution SEM • Large samples e.g Silicon Wafers (up to 150 mm) • Protective platinum layers for FIB • Carbon coating for elemental analysis and TEM These products are for Research Use Only.


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