EQUIPMENT & ACCESSORIES CATALOG EDITION V SPUTTER COATERS, SEM/TEM CARBON COATERS


Rates of Sputtering


A question regularly asked is what difference is there in sputtering rates for each of the target materials. The following list gives the variance of the materials in relation to gold, assuming gold to be: 1, it is impossible to give actual coating rates as this varies with sputtering conditions.


Au Ag Co Cr


Cu Fe


Mo Ni


Pd Pt


Ta W


Gold


Silver Cobolt


Chromium Copper Iron


Molybdenum Nickel


Palladium Platinum Tantalum Tungsten


1.0 1.2 0.5 0.5 0.7 0.5 0.3 0.5


0.85 0.6 0.2 0.2


Comparative Sputter Data Iridium and other materials


Samples were coated using an EMS 575X Sputter Coater and were examined using a Hitachi S-5200 Field Emission SEM.


Gold


Magnification: Coating Time: Current Used:


Gold/Palladium


15,000 X


10 seconds 20 mA


100,000 X 10 seconds 20 mA


300,000 X 10 seconds 20 mA


Magnification: Coating Time: Current Used:


Chromium


15,000 X


10 seconds 20 mA


100,000 X 10 seconds 20 mA


300,000 X 10 seconds 20 mA


Magnification: Coating Time: Current Used:


Iridium


15,000 X


30 seconds 100 mA


100,000 X 30 seconds 100 mA


300,000 X 30 seconds 100 mA


Magnification: Coating Time: Current Used:


No Coating


15,000 X


10 seconds 20 mA


100,000 X 10 seconds 20 mA


300,000 X 10 seconds 20 mA


Magnification: Coating Time: Current Used:


Platinum


15,000 X N/A N/A


100,000 X N/A N/A


300,000 X N/A N/A


Magnification: Coating Time: Current Used:


22


15,000 X N/A N/A


100,000 X N/A N/A


300,000 X N/A N/A


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