EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS


zzzQ150R Plus (continued) Safety


The Q150R Plus meets key industry CE standards: • All electronic components are protected by covers • Implosion guard prevents user injury in event of chamber failure


• Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened


• Electrical interlocks remove power when source head cover opened • Overheating protection shuts down power supply


SPECIFICATIONS Instrument Case


Weight


Packed Dimensions Work Chamber


Display User Interface Sputter Target Specimen Stage


50 mm Ø rotation stage with rotation speed of 8-20 rpm. Other stages available on request.


Vacuum Rotary Pump


Vacuum Measurement Ultimate Vacuum


Sputtering insert. Gold (Au) fitted as standard, but other metals available


Carbon fiber evaporation insert and automatic source shutter


Optional 5 m3 mbar /hr two-stage rotary pump


with oil mist filter (order separately) Pirani gauge 2 x 10-2


Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping with dry nitrogen gas Sputter Vacuum Range


Between 7 x 10-3 for gold


Processes


Sputter Deposition Current Visual Status Indicator


Single target: 1 - 140mA All targets: 60 - 420mA


A large status multi-color indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a process at distance.


10262 optional glow discharge attachment (for R S and R ES versions)


Base plate. Standard specimen stage and optional film thickness monitor (FTM)


The indicator LED shows the following states: • Initialization • Process running • Idle


• Coating in progress • Process completed


• Process ended in fault condition Audio indication also sounds on completion of the process. and 1 x 10-1 mbar


585mm W x 470mm D x 410mm H Total height with coating head open is 650 mm


28.4 kg (Packed 42 kg) 725 mm W x 660 mm D x 680 mm H


Borosilicate glass 150 mm ID x 127 mm H


115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), capacitive touch color display


Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due


Disc-style 57 mm Ø 0.1 mm thick gold (Au) target is fitted as standard. R S and R ES versions only


Optional flat rotation stage for 100 mm/4 wafers


22


Optional rotation stage for glass microscope slides


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