EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS


zzzQ150 GB Turbo-Pumped Sputter Coater/Carbon Coater — For Glove Box (continued) • Carbon fiber evaporation head insert (3250)


• Metal evaporation and aperture cleaning head insert (3260), using tungsten wire baskets and molybdenum boats. Includes electrode extensions to allow upwards evaporation, if required. Note: when the electrodes are fitted some stage options cannot be used


Specimen stages


The Q150 GB has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage).


• 6800-S rotation stage, 50mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment.


• 6801 rotate-tilt stage, 50mm Ø with height adjustment (target to stage height variable between 37mm and 60mm). The tilt angle can be pre-set.


• 6803 variable angle 'Rota-Cota' rotary planetary specimen stage with 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs.


• 3360 flat rotation stage for 4"/100mm wafers. Includes gear box which needs to be fitted when the optional FTM is being used or for


SPECIFICATIONS


Vacuum Module Size 267mm W x 490mm D x 494mm H (total height with coating head open: 767mm) 310mm W x 357mm D x 262mm H


Power Supply Size User Interface Size Weight


Packed Dimensions Work Chamber


Safety Shield Display


User Interface


Sputtering Target Specimen Stage


160mm W x 157mm D x 42mm .............. 40kg


725mm W x 660mm D x 787mm H (44kg)


Borosilicate glass 152mm Ø (inside) x 214mm H


Integral polyethylene terephthalate (PET) cylinder


145mm 320 x 240 color graphic TFT (Thin Film Transistor) display


Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last 100 coatings carried out and reminders for when maintenance is due


Disc style 57mm Ø x 0.3mm thick chromium target is fitted as standard


60mm Ø rotation stage. Rotation speed 8 ~ 20 rpm


For alternative stages see Options and Acessories Specimen Shutter


Vacuum


Turbomolecular Pump Internally mounted, 70L/s air-cooled turbomolecular pump 5m3


Rotary Pump /hr-1 two-stage rotary pump


Vacuum Measurement An active full-range gauge is fitted Typical Ultimate Vacuum 5x10-5


Sputter Vacuum Range Between 5x10-3 34 and 5x10-1 mbar


with oil mist filter (order separately: 91003) mbar


An automatic shutter is fitted as standard to shield specimens during pre-sputtering of oxidising metals and protection during evaporation outgassing procedures


Interlocks


The Q150 GB is interlocked to prevent continuous pumping of the glove box in the event of a vacuum leak Processes


Sputtering 0-150mA to a pre-determined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without "breaking" vacuum and with built-in rest periods)


Carbon evaporation A robust, ripple free, D.C. power supply featuring pulse evaporation ensures reproducible carbon evaporation from rod or fiber sources. Current pulse: 1-90A


Metal evaporation and aperture cleaning insert (option) For thermal evaporation of metals from filaments or molybdenum boat can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation times: up to four minutes


Services and other information Gases


Nitrogen Venting Gas Electrical Supply


Conformity


Quick-connect inlet for: argon sputtering process gas, 99.999% ("zero grade")


(no quick-connect – uses the glove box atmosphere as the source


90-250V ~ 50/60 Hz 1400 VA including rotary pump power. 110/240V voltage selectable


CE conformity: Power Factor Correction. Complies with the current legislation (CE Certification) and ensures efficient use of power which means reduced running costs


4” wafer stage option


standard rotating specimen stage and optional film thickness monitor (FTM)


coating over the full area of the stage.


• 6804 rotation stage for glass microscope slides. Allows two 75 x 25mm slides to be coated.


Note: all rotation stages have rotation speeds that can be variable between 8 and 20 rpm.


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44  |  Page 45  |  Page 46  |  Page 47  |  Page 48  |  Page 49  |  Page 50  |  Page 51  |  Page 52  |  Page 53  |  Page 54  |  Page 55  |  Page 56  |  Page 57  |  Page 58  |  Page 59  |  Page 60  |  Page 61  |  Page 62  |  Page 63  |  Page 64  |  Page 65  |  Page 66  |  Page 67  |  Page 68  |  Page 69  |  Page 70  |  Page 71  |  Page 72  |  Page 73  |  Page 74  |  Page 75  |  Page 76