EQUIPMENT & ACCESSORIES CATALOG EDITION IV SPUTTER COATERS, SEM/TEM CARBON COATERS zzzQ150R Plus (continued)


damage when the plasma interacts with the sample. The Q150R Plus series uses low temperature enhanced-plasma magnetrons optimized for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.


The Q150R S Plus and Q150R ES Plus use easy- change, 57 mm diameter, disc-style targets which are designed to sputter non-oxidizing (noble) metals – ideal for W-SEM applications. The Q150R S Plus and Q150R ES Plus are fitted as standard with a gold (Au) sputter target.


Other targets options include Au/Pd, Pt/Pd, Pd, and Cu. Platinum (Pt) can also be sputtered with the optional Pt coating vacuum hose assembly.


Interchangeable Plug-in Heads


This allows the user to configure the system as a sputter coater, evaporator or glow discharge system – all in one space saving format. A carbon cord evaporation insert is available as an option. Automatic detection of the head type when changed.


Detachable chamber with built- in implosion guard


Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process.


Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples.


Tall chamber option is available for carbon evaporation to avoid sample heating, to improve uniformity for sputtering and to hold taller samples.


Multiple stage options


The Q150R Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage). Some examples:


• Rotation stage (supplied as standard): 50 mm Ø can accommodate six standard stubs. Height can be pre-set.


• Rotate-tilt stage for improved uniform coating: 50 mm Ø. Tilt and height can be pre-set.


• Variable angle, rotary planetary stage for heavily contoured samples


• Large flat rotation stage with offset gear box for 4"/100 mm wafers


• Rotation stage for glass microscope slides Other options are available on request.


continued >>>> 21 Ladybird larvae hair coated 10nm Au x 2.5k magnification


Pure silk coated 10nm Au x 18k magnification


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