news digest ♦ Equipment and Materials
Vistec Lithography has received an order from Turkey for one of its electron-beam lithography systems.
The global supplier of advanced electron- beam lithography systems will deliver an EBPG5000plusES to the newly formed Nanotechnology and Application Centre (SUNAC) of the Sabanci University based in Istanbul. The Gaussian Beam system fulfils the challenging requirements of the institute which will collaborate in the field of nanotechnology research with other institutions.
from a Turkish university. “Due to their flexibility and the multi user environment, our systems are a perfect match to the needs of universities or industry research institutions. After selling a number electron-beam lithography systems to international well-known institutes in the last year, we are highly motivated to continue this positive development in the upcoming year”, says Rainer Schmid, General Manager at Vistec Lithography .
Steed Aquires ATSI
The pollution control equipment developer has expanded its portfolio by offering complete gas abatement solutions for the semiconductor, LED and solar industries.
Steed Technology, a provider of thermal processing equipment for the semiconductor, LED and solar industry has acquired all of the outstanding stock of Applied Technology Specialists, Inc. (ATSI).
“The EBPG5000plusES is a 100kV high performance system, which is state of the art. It will enable us to address the nanotechnology development needs of natural sciences, applied sciences and engineering programs”, says Volkan Özgüz, Director of the Nanotechnology and Application Centre.
“Due to its flexibility and advantages, the EBPG5000plusES is a perfect investment for the future and will help to establish SUNAC as one of Turkeys leading nanotechnology institution,” he continues.
Vistec’s EBPG5000plusES are dedicated electron- beam lithography systems, which have been developed to meet the diverse requirements for advanced nano-lithography applications in direct write for both R&D and production of GaAs devices.
It enables a rapid exposure with a 25MHz rate and a minimum feature size of less than 8nm. The EBPG5000plusES system is capable to expose various substrate types including masks and dimensions up to 150mm size.
Vistec is pleased to have received its first order 164
www.compoundsemiconductor.net January / February 2011
ATSI develops advanced pollution control equipment and technology to render safe Volatile Organic Compounds (VOCs) and toxic exhaust gases found in high tech industries.
Both companies will share the Steed name and manufacturing of all products will remain in Northern California. Research and development of new products and technologies will remain in Oklahoma. Sales channels will be expanded to accommodate existing and new customer and focus on regions with new air quality restrictions.
Steed will now acquire the ATSI EcoGuard line of “Point of Use” (PoU) gas abatement / scrubber and pollution control equipment. Both firms are currently working to combine their technologies to work in unison.
Customers of Steed and ATSI will soon be able to purchase diffusion/LPCVD process and abatement equipment as a totally integrated system with onboard environmental control features developed by ATSI. Customers of both companies can count on receiving the service and support they have received in the past.
With new increasingly strict environmental regulations such as the “Greenhouse” law (AB32),
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