deposition industry
Figure 12
improvement in deposition rate has yielded an extra run/shift.
Modeling a HULA carrier as a comparison exercise was the next logical step to understand if a HULA fixture could improve on collection efficiency of the “ideal 60 wafer system” conceptualized earlier. Modeling a HULA system with 3 domes of 14 wafers/each allowed it to fit in an identical n = 3.3 vapor flux conditions used before. The HULA batch of 42 x 150mm wafers fits in easy-exchange small domes in the same 40° half-angle modeled earlier. An ideal cosine flux for this HULA shows 27.7% of the gold evaporated will be collected on the 42 wafers. This represents a 43% collection efficiency improvement over Temescal’s existing FC-4400 with 30 wafers and a 5% improvement of the “ideal 60 wafer” modeled results.
This completes comparison of ideal* modeled deposition across all three systems. Clearly the smaller batch HULA with easy-exchange carriers and a slightly higher collection efficiency offers a compelling design for consideration. These three cases are illustrated in Figure 13. Table 1 presents
the following data with respect to the three carriers compared in Figure 13: dimensional assumptions constraints (e.g., wafer-edge exclusion) ideal* collection results. The same vapor cloud and material evaporation power was used in the modeling of each scenario.
Table 2 presents measured results from two production tools in Temescal laboratories. These were made in 2012 during customer acceptance tests. It is important to note that ideal* modeled collections do not have any correction for typical losses, such as; spitting, process variables associated with beam sweep, or for the conditioning processes common in pre-deposition. Process comparisons outlined here introduce part of the fundamental advantages of the Auratus Process which has now been in production for three years across two continents. Please contact Temescal for more information and access to sample trials.
The author would like to thank Ping Chang – Senior Staff Scientist, Dr. Phillip Greene – Staff Scientist, Cris Kroneberger – Engineering Manager and Pheng Sin – Staff Designer for their help in the development of this article.
© 2013 Angel Business Communications.
Permission required. Table 1
Figure 13
Table 2 March 2013
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