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NOZZLES & TOOLING CUSTOM & LED NOZ ZLES COMPONENT HANDLING A UTOMATION TOOLING


September, 2022 Production Delivering Semiconductor


Cleanroom Fire Safety By Del Williams


this reason, the National Fire Protection Association (NFPA) 318 Standard for the Protection of Semiconductor Fabrication Facilities stipulates requirements for smoke detection in semiconductor fabs. Air at these facilities requires significant monitoring for the


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presence of even minute amounts of smoke or aerosol particles Fab equipment can pose a significant fire risk due to the use of


combustible plastic materials, flammable and pyrophoric chemicals, and the presence of high voltage electrical power. The industry is also increasing its use of pyrophoric materials used in the process, which can spontaneously ignite when exposed to oxygen. Early fire and smoke detection is crucial to maintain perform-


ance. For example, producing semiconductor grade silicon involves cleaning polysilicon chunks to a purity as high as 11N. One concern at the tool level is the proximity of combustible ma-


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terials to high voltage equipment, such as high-powered lasers used in metrology and photolithography processes and plasma-based sys- tems used in ion implanters. As a result, all systems must meet the safety standards set forth


here is a critical need for semiconductor fabricators to protect cleanrooms from fires. Fire also brings with it smoke particulates that can cause catastrophic product and equipment damage. For


in the National Electrical Code® and by organizations such as NFPA and SEMI. Insurers may also have specific requirements for fire pro- tection for any given type of tool. Generally, OEMs outsource the fire detection or suppression sys-


tems design, installation and validation testing, with work complet- ed before the tool is shipped to the semiconductor manufacturing fab. For electrical hazards, the fire safety system includes the full inte- gration of high sensitivity smoke detection systems like VESDA de- vices. For flammable liquid or combustible plastic hazards, the fire safety system includes flame detectors with suppression systems using CO2 or fine water mist (FWS).


Fire Protection Specialist Koetter Fire Protection International (KFPI) is a premier dealer


of Notifier by Honeywell and a designer, installer and certifier of fire protection systems for semiconductor process tools. KFPI commonly installs and integrates an economical “mini


VESDA” unit, such as the VESDA LaserFOCUS (VLF) from Notifier, within each tool. The VLF is designed to protect small tool manufac- turing environments. Since semiconductor tools are essentially small rooms, the unit is well suited to the application. The detector works by continually drawing air into sampling holes in a pipe network. The air is filtered and passed into a detection chamber where light scat- tering technology detects the presence of very small amounts of smoke. The VESDA VLF supports a number of pre-engineered pipe network designs to simplify installation. There are considerable airflow issues to manage given all the


equipment within a tool, so KFPI must also properly mount and route the air sampling piping to enable it to reach all the critical areas. Before the tool is shipped to a fab, KFPI performs “wire burn” testing to validate that the unit detects the specified fire size or in- cipient thermal event and alarms properly. In KFPI’s experience, VESDA units have proven to be effective


OUTSOURCING MACHINED PARTS? ASK US ABOUT OUR PRECISION MANUFACTURING SERVICES.


Did you know that Count On Tools is more than just a nozzle manufac- turer? We also operate a state-of-the-art machine shop where all of our precision components are manufactured. Because extreme accuracy is mandatory, specialized precision equipment is necessary. COT operates with the most advanced hybrid machining centers offering multi-spin- dle/multi-axis CNC milling and turning capabilities. From prototype to long term supply, COT can handle your outsourced precision machined components.


COUNT ON TOOLS, INC.


2481 Hilton Drive, Suite 3, Gainesville, GA 30501 Tel: (770) 538-0411 • sales@cotinc.com


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in the field. Traditional spot smoke detectors simply do not work in these high airflow exhaust environments because the smoke particles are diluted to levels far below available alarm levels. High sensitivi- ty smoke detection is required within these types of tool applications to provide real protection. “For semiconductor fab facilities concerned about potential dam-


age from smoke contamination, having reliable fire detection equip- ment that is highly sensitive and can produce repeatable results is critical,” says Matt Wyman, CEO and CTO, KFPI. “Given the large presence of high voltage production equipment and increasing use of pyrophoric liquids and gases within fab tools, there are increasing needs to install VESDA high sensitivity smoke detection systems. These are not only being proven in testing and field applications but


are also increasingly included in regulatory standards.” Contact: Honeywell Building Technologies, 715 Peachtree Street NE, Atlanta, GA 30308 % 404-216-6186


E-mail:


megan.mcgovern@honeywell.com Web: www.buildings.honeywell.com r


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