September, 2022
ST. PETERSBURG, FL — Plas- ma-Therm, a leading manufac- turer of plasma-process equip- ment for the semiconductor and compound semiconductor indus- tries, today announced it has re-
www.us-tech.com
system reliability and perform- ance to customers. Top global chipmakers have already placed multi-tool orders for the newly designed Heatpulse RTP plat- form, which is fully compatible with the legacy AG Heatpulse 8108 and 8800 systems and ex- isting processes. Representing the first of sev-
eral phases in Plasma-Therm’s planned technology roadmap for Heatpulse RTP, the new platform includes greater flexibility to ac- commodate multiple wafer sizes, upgraded robotics, and a control system backed by Cortex, Plas- ma-Therm’s industry leading software. The new, easily implemented
Page 37 Plasma-Therm Redesigns Heatpulse RTP Platform
Heatpulse RTP wafer size conver- sion kits eliminate the complicat- ed, time-consuming system hard-
ware changes. Contact: Plasma-Therm,
10050 16th Street N,
St. Petersburg, FL 33716 % 727-577-4999 E-mail:
information@plasmatherm.com Web:
www.plasma-therm.com
Heatpulse RTP platform.
designed its flagship Heatpulse Rapid Thermal Processing (RTP) platform. The move was driven by three key factors: an increase in market demand for power de- vices, other specialty markets and up to 200mm silicon fabs; the need to establish a new sup- ply chain to enable faster time to market and bring customers readily available spare parts for their systems; and the company’s commitment to deliver improved
Microchip Intros MPU
Based SOMs CHANDLER, AZ — Microchip Technology has expanded its port- folio of microprocessor system-on- modules (SOMs) with the SAM - 9X 60D1G-SOM ARM 926EJ-S- based embedded MPU running up to 600 MHz. Software for the SAM9X60D1G-SOM is available with bare metal or RTOS support through MPLAB Harmony3, or complete Linux mainlined distri- butions. The SOM, based on the
SAM9X60D1G System in Package (SiP), is a small hand-solderable module that includes the MPU and DDR in a single package, along with power supplies, clocks and memory storage. The SAM - 9X60 D1G-SOM is Microchip’s first SOM equipped with 4 Gb SLC NAND flash to maximize memory storage of data in appli- cation devices, while the onboard DDR reduces the supply and price risks associated with memory chips. The small-form-factor SAM 9X60D1G-SOM also includes an MCP16501 power manage- ment IC (PMIC), which simplifies the power design effort to a single 5V voltage rail to enable lower-
power systems. Contact: Microchip Technol- ogy, Inc., 2355 West Chandler
Boulevard, Chandler, AZ 85224 % 480-792-4386 E-mail:
kim.dutton@microchip.com Web:
www.microchip.com
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