March, 2019 Continued from previous page
process samples that our users might be working with. We hadn’t considered how we’d accommodate non-standard sample sizes, or what the impact might be in total cost of ownership with respect to chemical usage,” adds Schweiger. In addition, some of the new equipment had
its decks reconfigured once the tools were in- stalled. Several of the earlier wet benches, some of which were purchased over 20 years ago, were al- so modified to allow for more flexibility in meeting the process needs of the user community “Our initial plan for the deck space, and pro-
cessing capability of the benches, wasn’t flexible enough to properly serve our user community. We worked with JST Manufacturing to implement modifications so that the bench decks were simpler, and could provide more working space,” Schweiger concludes. “Although there are similarities
in the wet processing techniques used to create a broad variety of MEMS and nano devices, each process might not be identical in concentration, time, temperature and chemicals used,” Bertagnolli explains. As a result, there are a wide vari-
ety of equipment designs available that include process modules for solvents, acid, bases, deionized water rinse and drying. Mechanical, ultrasonic or megasonic agitation as well as high- pressure spraying and other processes may also be incorporated, if needed. Another consideration is safety
and there are many mandated re- quirements for items such as ventila- tion, fire suppression, chemical han- dling and explosion prevention.
Equipment Design Modification With the rapid growth of the
MEMS and nano markets, many manufacturers are turning to auto- mated equipment
to increase
throughput and ensure process re- peatability. Fully automated process equipment often includes multiple stations or modules as well as robot- ics, sophisticated control, data log- ging and monitoring systems. The design of many wet process-
ing systems is proprietary; therefore specs are protected by the equipment manufacturer, as well as the user. Considering all of the design vari- ables, it is wise to visit an equipment manufacturer with design capabili- ties and an application laboratory. JST Manufacturing has an ap-
plications laboratory at its facility where users can develop their process with various chemistries and conduct tests on the actual equipment (in- cluding immersion, spray tools and dryers). The laboratory includes so- phisticated metrology equipment in- cluding a scanning electron micro- scope and a Tencor particle counter. By visiting such labs, end users
can determine and optimize their processes, and minimize the amount of chemicals required as well as de- termine the tool features they need for their applications. This can save the customer money by eliminating features they do not need. “Even though a manufacturer
arrives with a good idea how they want to handle the wet processing, we are often able to recommend mod- ifications after we have a chance to review the project,” says Bertagnolli. “Sometimes design variations
will perform the cleaning or etching work in the manner required, but will also save money, reduce the floor space requirement, simplify maintenance or provide other bene- fits,” she adds.
www.us-
tech.com Determining Wet Processing Parameters...
Determining Parameters Many users insist on a standardized ap-
proach with customizable features that will best handle their applications parameters, in order to facilitate the economical design and building of a wet processing equipment solution. Using SOLIDWORKS 3D-modeling software,
a company such as JST can make minor modifica- tions to meet the needs of each application. The equipment is modular by design, allowing for easy changing and reconfiguration should the process or product requirements change. This is a big ad- vantage to users looking to have standard equip- ment with slight modifications. Each component is designed with software that is capable of performing every possible tool
function, including those that are not required. This type of custom work enables end users the ability to create their own process, or chemical recipes, with all sub-routines at their disposal. “Even though users may not need some of the
features today, it’s possible that they may want to utilize them in the future for other applications, which can be both economical and powerful. This added flexibility in the programming of their equipment enables them to determine custom chemical concentrations to be used at a later date depending on their process requirements,” says Bertagnolli. Contact: JST Manufacturing, Inc., 219 E.
50th Street, Boise, ID 83714 % 800-872-0391 fax: 208-377-3645 E-mail:
info@jstmfg.com Web:
www.jstmfg.com r
Page 23
FACT: HELUKABEL supplies pre-assembled data cables for Industrial Ethernet systems. With molded M12 and RJ45 industrial connectors, customers can
piece together any possible combination of cables and connectors to design a product built exactly for their needs.
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