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Page 22


www.us- tech.com Nano Manufacturing and R&D By Ed Sullivan A


s the market for nanotechnolo- gy and MEMS solutions contin- ues to ramp up, the rate of or-


ganizations seeking to get involved with this sector is also burgeoning. Yet, there are still significant chal- lenges that are, in many cases, posing difficulties in entering this market. For example, many developers


who would like to enter the MEMS or nano field lack the resources, includ- ing development time and equip- ment, to do so. Also, specialized pack- aging in these areas, which requires simultaneous contact with its own environment while being isolated from other environments, is often ex- pensive and difficult. “MEMS research and manufac-


turing organizations are meeting those challenges in unique ways,” says Louise Bertagnolli, president of JST Manufacturing, a specialist in wet processing equipment for the MEMS, nano, photovoltaic, wafer, and related industries. “An increas- ing number of universities and insti- tutions offer the facilities, including equipment and instrumentation, to conduct MEMS and nano research and even produce prototypes and modest production runs.” Wet processing systems, one of the areas that organizations focus


C


their attention on, are used for such procedures as etching, photoresist wet stripping, photolithography, metal lift-off, and related polymer re-


such as the screen rotation of today’s cell phone displays and the optical switches and mirrors to redirect or modulate light beams. Future appli-


available to both educational and commercial researchers. The Univer- sity of Michigan’s Lurie Nanofabrica- tion Facility (LNF) is one example. Michigan’s facility works in all


areas of semiconductor device and cir- cuit fabrication, integrated microsys- tems and MEMS technologies, nan- otechnology, nanoelectronics, nano - pho tonics and nanobiotechnology. It is an open-use facility with hundreds of users from various departments, as well as many other universities and businesses. According to Dennis M. Schwei -


ger, senior director of infrastructure, soliciting the opinion of equipment manufacturers regarding equipment design for such facilities can be high- ly beneficial. “It is important to our diverse


JST Manufacturing’s applications laboratory.


moval processes. Those processes aid researchers


4:53 PM Page 1


and manufacturers in improving product quality and throughput in a wide range of MEMS and nano appli- cations, such as microsensor- and mi- croactuator-based devices. Some of these capabilities are used in contemporary applications


cations will provide complete “sys- tem-on-a-chip” capabilities.


Making Research More Available


Although the cost of MEMS and


nano application development can be very expensive, some institutions are installing facilities and making them


users that we provide them with wet processing equipment that suits their purposes well due to the fact that we essentially rent the lab space and equipment needed,” says Schweiger. The original equipment design


for the new lab area’s wet processing benches was very specific and deter- mined by the LNF staff. “When we first started out, we looked at it in terms of process flow and didn’t take into ac- count the variety and variation of


Continued on next page


Determining Wet Processing Parameters for MEMS,


March, 2019


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