news digest ♦ compound semiconductor ♦ product news


Canadian research centre orders Oxford Instruments tools


Oxford Instruments Plasma Technology (OIPT), leader in systems for etch, deposition and growth, has recently received a multi-system order from the University of Waterloo, Ontario, Canada for installation in their new cleanroom facility.


The process tools ordered are OIPT’s System100 ICP & System133 PECVD, and a FlexAL PECVD/ALD Cluster tool, with multi- wafer batch capability and the potential for providing a number of process applications.


by the generous support IQC receives from the Canada Foundation for Innovation, the Ontario Research Fund, the University of Waterloo, and the namesakes of the new building, Mike and Ophelia Lazaridis. OIPT’s System100 ICP Tool OXF Oxford Instruments pursues responsible development and deeper understanding of the world through science and technology, and this order for another new University research facility is testament to that commitment.


CanYang places multiple order for X-ray kits for LED Process Control


Jordan Valley to provide multiple X-ray kits to large HBLED manufacturer


Jordan Valley, a provider of advanced metrology solutions for the compound semiconductor industry have announced it has received multiple orders for its new QC3(tm) X-ray diffractometer system from leading LED manufacturer CanYang.


OIPT tools offer powerful stand alone and clusterable process modules, enabling a wide range of applications, and the University of Waterloo will be implementing the systems for multiple process techniques. These include Bosch, Cryo silicon etch, Compound Semiconductor, Metal etch, PECVD. In addition, one of the tools will be clustered to offer ALD process capability, to deposit Al2O3 conformal coating.


The equipment will be housed in the cleanroom at the Mike and Ophelia Lazaridis Quantum- Nano Centre, a new state-of-the-art building now under construction at the heart of the University of Waterloo campus. The facility, slated for completion in 2011, will be shared between the Institute for Quantum Computing and the Waterloo Institute of Nanotechnology.


The purchase of equipment is made possible 102 www.compoundsemiconductor.net June 2010


Jordan Valley Semiconductors UK was formed from the acquisition of Durham based Bede Scientific Instruments Ltd. by Jordan Valley in 2008.


CanYang is a global supplier of HB-LEDs. It is estimated that the HB-LED market is will grow from $5.3 billion in 2009 to $20.2 billion in 2014, representing a compound annual growth rate of 30.6%, as cited by Robert V. Steele PhD, Director, Optoelectronics at Strategies Unlimited, at the Strategies in Light Conference in February 2010.


The QC3(tm) is designed for routine analysis of semiconductor substrates, epilayer structures and processed device wafers for all compound semiconductor materials such as GaAs, InP, Si and GaN (with thick buffers). The reflections capable on the system allow the thickness, composition, relaxation and strain of multi-layer structures to be determined.


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