July, 2016
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Page 73 PPE Launches Plasma-Resistant Sealing Material
Houston, TX — Precision Polymer Engineering (PPE), a manufacturer of high-performance molded elastomer seals and O-rings, has launched its Nanofluor® Y75G high-purity, plasma-resistant sealing material. The highly-fluorinated material can be regarded as an FKM/FFKM hybrid, and is available in O-rings and custom shapes designed for use in critical applications. Having undergone comprehensive testing using
different plasma chemistries and plasma sour ces, data shows the new material performs, in many cases, significantly better than traditional FFKM products. In critical applications where the seal is in
direct contact with the chemistry, such as chamber lid seals, the challenge is sourcing a seal that is of the highest purity, is plasma-resistant, has low concentrations of nanoparticle filler specially com- pounded to reduce particle agglomeration, and yet is competitively priced. Finding an appropriate sealing material is critical to avoid wafer contami- nation which can reduce yield. In addition to this, it is also important to ensure seal lifetime compatibility with existing maintenance cycles and assess ways to potentially increase the process tool productive period, or uptime, leading to lower cost of con- sumables. Semiconductor manufacturing
creates some of the most aggressive environments encountered by seals and OEMs are continually making
Juki Intros LED Long Board Machine
Morrisville, NC — Juki Automation Systems (JAS), Inc., a provider of automated assembly products and systems and part of Juki Automation Systems Corporation, has introduced its new JX-350 LED mounter. The
conscious efforts to source better sealing materials. The company has developed a highly chemical- resistant, nanofilled elastomer seal, which pro- vides a process-optimized sealing solution for key applications. The new material was tested against the market-leading materials in several commonly used plasma chemistries. Material mass loss was measured after a minimum of 12 hours’ continuous
direct exposure. According to the company, a 2,030 percent improvement in erosion rate using the new material, compared with a key competitor, was observed. When compared with similar filler sys- tem groups, its erosion rates were unsurpassed. The material is designed to ensure low plas-
ma erosion rates and increased seal lifetime, which, when coupled with low trace metal content, reduces the risk of yield loss and warranty fail- ures. In addition, the high fluorine content guaran- tees a generic high chemical resistance, while the use of low levels of nanoparticle filler leads to sig- nificantly lower risk of particle generation and
yield loss through large killer particles. Contact: Precision Polymer Engineering, Ltd.,
4702 North Sam Houston Parkway West, Suite 100, Houston, TX 77086 % 713-482-0123 E-mail:
prepol.sales-usa@
idexcorp.com Web:
www.prepol.com
Nanofluor® molded sealing material. See at SEMICON West, Booth 1345
JX-350 LED long board mounting machine.
JX-350 LED supports a wide variety of LED nozzles and can place up to six diffusing lenses overtop of the LED simultaneously for backlighting applications. The JX-350 LED Mounter offers
a flexible placement system specially designed for LED lighting products and mid-to-large LCD display back- lights. It can support ultra-long boards up to 1,500 mm (59.06 in.), and laser centering for high-speed,
high-accuracy placement. Contact: Juki Automation
Systems, 507 Airport Boulevard,
Morrisville, NC 27560 % 919-460-0111 E-mail:
gryden@jas-smt.com Web:
www.jukiamericas.com
See at SEMICON West, Booth 6143
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