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877-646-0900
July, 2016
NanoFocus: Inspection System for the
Semiconductor Industry
McMinnville, OR — NanoFocus, a de- veloper and manufacturer of optical 3D surface measuring technol- ogy, has introduced its measur- ing system, µsprint hp-opc 3000, for the optical inspection of probe cards. The machine is designed
specifically for the require- ments of wafer test locations with a variety of different probe cards, as well as large- volume throughput. Probe cards are special
test devices used for standard function tests of wafers at the end of the front-end process — after the functional structures of the electronic elements on a wafer are fully manufactured. The µsprint hp-opc 3000
system is responsible for en- suring that the wafers are in sound condition after testing for reducing yield losses, as well as for minimizing the time and number of complex main- tenance cycles probe cards are regularly subjected to. Faulty probe cards can cause
damage during wafer testing. Al- though such faulty probe cards can lead to a correct result of the func- tional test, they can cause unnoticed damage to a wafer rendering it unus- able.
Using the µsprint can reduce the need for repair. The machine can
be integrated into process control systems with a SECS/GEM commu-
µsprint hp-opc 3000 wafer inspection system.
nication interface. The tool complies with all necessary and common stan- dards required at front-end wafer
test locations. Contact: NanoFocus, Inc., 1945
NE Baker Street, McMinnville, OR 97128 % 804-652-8970 E-mail:
sales@nanofocus.com Web:
www.nanofocus.com
See at SEMICON West, Booth 1129
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