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Equipment and Materials ♦ news digest


EPC says that compared to a state-of-the- art silicon power MOSFET with similar on- resistance, the EPC2010 is smaller and has many times superior switching performance. Applications that benefit from eGaN FET performance include RF envelope tracking, wireless power transmission, high-speed DC- DC power supplies, point-of-load converters, class D audio amplifiers, hard-switched and high frequency circuits.


Equipment and Materials


Aixtron receives first dry scrubbers for new R&D centres


Eleven CLEANSORB waste gas treatment systems will be used at Aixtron›s R&D centres for MOCVD equipment and processes in Germany and China


Aixtron SE has chosen CS Clean Systems dry bed scrubbers for its new R&D centres.


CLEANSORB columns


In total, 11 CLEANSORB CS200SC models are to be installed at the Aixtron R&D Centre in Dornkaul, Aachen, Germany, as well as at the new training facility in Suzhou Industrial Park (SIP) in China. The Suzhou training centre is a joint venture between Aixtron and the prestigious Suzhou Institute of Nanotech and Nanobionics (SINANO).


When up-and-running, the CLEANSORB dry bed absorbers will be serviced directly from the CS CLEAN SYSTEMS China office based in Shanghai.


The gases and liquid organometallic precursors used in the MOVPE growth and etching of III-V epitaxial structures are critical in terms their toxic, pyrophoric, and corrosive natures. CLEANSORB dry chemisorber technology does not use activated carbon or other combustible materials. Hazardous gases are converted to stable solid by-products by dry chemical reaction at room temperature without the requirement for heating or the generation of contaminated waste water.


The hermetically sealed CLEANSORB absorber column design ensures that the MOCVD user never comes into contact with toxic MOCVD by-products. At the end of their absorbing lifetimes, CLEANSORB columns are returned to the local CS CLEAN SYSTEMS service partner for service. After refurbishment and refilling with fresh chemisorber, the absorber column is then shipped back to the customer for further use.


CLEANSORB dry bed absorber CS200PS PRIMELINE series with refillable


January / February 2012 www.compoundsemiconductor.net 211


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