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August, 2015
Entegris Filtration Enables Contamination Control
Billerica, MA — Entegris, Inc. (NAS- DAQ: ENTG) has released Torrento® X Series 7nm filters with FlowPlane linear filtration technology. Flow- Plane is the semiconductor indus- try’s first scalable, linear, high-flow filtration platform enabling ad- vanced wet cleaning applications for the 10nm node and beyond. The first in a series of filters
based on the linear filtration technol- ogy, the FlowPlane S model is de- signed for point of dispense (POD) applications, enabling improvements in both on-wafer defectivity and yield for critical wet cleaning applications. According to the company, a filter is the last line of defense to prevent de- fect-causing contaminants from reaching the wafer. The company’s smaller, more powerful filtration so- lution will enable users to effectively implement their 10 and 7nm technol- ogy nodes. Torrento X series 7nm fil- ters with FlowPlane linear filtration technology improve retention and in- crease flow rate performance by 100 percent compared to similarly sized
radial filters. Moreover, FlowPlane users will benefit from the format’s smaller device footprint as well as improved wafer defectivity perform- ance.
Advanced Torrento X series 7nm filter.
Contact: Entegris, Inc., 129
Concord Road, Billerica, MA 01821 % 800-394-4083 or 978-436-6500
fax: 978-436-6735 Web:
www.entegris.com.
Tolomatic Actuators on Rockwell Automation Design Software
Hamel, MN — Tolomatic electric rod actuators and rodless electro-me- chanical actuators are available for specification on Rockwell Automa-
According to the company, its
featured electric rod actuators (ERD, RSA) can meet virtually any budget and performance requirement. ERD
Tolomatic electric actuators.
tion’s Motion Analyzer web-based software, making it easier for engi- neer teams to specify, design and val- idate complete motion control sys- tems that use Allen Bradley controls. The Rockwell Automation mech -
atronic design tool, with its cloud- based architecture, helps mechani- cal, electrical and controls engineers collaborate efficiently to create proto- type machines, according to Rockwell Automation. The interdisciplinary design approach helps decrease time to market, reduce cost to engineer and improve overall machine per- formance. The motion analyzer com- bines application requirements with product ratings and specifications to provide solutions that exactly meet needs.
electric actuators are a low-cost al- ternative to pneumatic cylinders. The RSA high-thrust actuator com- bines high performance and mount- ing flexibility. Tolomatic rodless elec- tro-mechanical actuators (MXE, MXB) are available in both screw- and belt-drive designs and a variety of bearing styles and options. Products can be built to order in
15 days or less, and are backed by over 60 years of product innovation and the best service in the industry. Tolomatic is a product partner compa- ny of the Rockwell Automation Part-
nerNetwork™ Encompass Program. Contact: Tolomatic, 3800 Coun-
ty Road 116, Hamel, MN 55340 % 800-328-2174 or 763-478-8000 Web:
www.tolomatic.com
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