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Metrology, Test and Measurement Award


Bruker Corporation LumiMap Electroluminescence Tool


In 2013 Bruker Corp. introduced the LumiMap electroluminescence system for optical and electrical characterization on epitaxial (epi) growth wafers for high- brightness (HB) LEDs.


LumiMap is a value-oriented alternative to conventional, multistep, operator- dependent indium dot methods of epi (made by epitaxial growth) wafer characterization. The system features rapid, non-destructive, no post measurement chemical cleaning, software-controlled measurement locations, and repeatable optical and electrical measurement capabilities through forming a temporary LED (light- emitting diode) device on an epi wafer.


The results obtained by LumiMap are well correlated with those on the final HB-LED (high brightness LED) device, providing an early warning of process shifts, which in turn reduces the risk of expensive scrap events and improves yields. Simple wafer exchange and intuitive software provides the industries easiest to use interface for production quality control, as well as epi process development. The long measurement lifetime of the proprietary conducting probe meets the strictest industry cost of ownership requirements.


Lake Shore Cryotronics and EMCORE


8500 Series THz System for Material Characterization


The Lake Shore 8500 Series THz System for Material Characterization is a measurement platform that provides the materials development community with a fully integrated solution for exploring THz frequency electronic, magnetic, and chemical properties of materials in cryogenic and magnetic field environments. The system features a coherent, variable frequency continuous wave (CW) THz spectrometer from EMCORE and specially designed THz emitter and detector components which offers high spectral resolution THz-transmission measurements of materials in these extreme environments. Integrated software operates the temperature controller, helium level monitor, superconducting magnet supply, and spectrometer for automated turn-key experimental control.


In the quest to develop high-speed computing, storage, imaging, and communications applications, novel and existing electronic and magnetic materials with favourable high frequency material properties will need to be identified and characterized. The Lake Shore 8500 Series THz System addresses the challenge of the development community seeking to explore the THz-frequency properties of bulk and thin film semiconductors, organic electronics and oxides.


Cryogenic temperatures and high magnetic fields are used to tune the THz-frequency response in order to help elucidate the physical mechanisms underlying the material’s electronic or magnetic properties. What’s more, the continuous-wave THz source offers a more cost effective approach, compared


to the more conventional time-domain THz (TDS) spectroscopy, for THz materials characterization. The fully integrated Lake Shore THz system is offered at a cost-point comparable to a stand-alone pulsed-laser source. Also important:


The system provides a solution for researchers who do not have the means to build a custom THz characterization system and who lack off-the-shelf software for management and analysis of their experiments. Going into the development of the system, one of Lake Shore’s primary objectives was to develop software that was easy to use. The company knew this would be key to how well the system is adopted by the materials development industry – particularly scientists and engineers who do not consider themselves terahertz experts.


Conventionally, low-temperature, high field THz measurements would be performed by placing a sample in the beam path of an optical cryostat and then painstakingly align the terahertz source and detector onto the sample.


Lake Shore, in close collaboration with EMCORE, developed robust THz emitter and detector components that have


March 2014 www.compoundsemiconductor.net 67


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