Equipment and Materials ♦ news digest position of the vacuum connections.
Additionally, there is the option of adapting the pump housing or customszing the pump to a specific vacuum chamber.
“With the best ratio between performance and size in the ISO 100- and 160-range, our new turbo molecular pumps offer an innovative concept. Rotors and Holweck stages have been optimised. The result is excellent vacuum performance and a previously unattainable pumping speed. This accelerates pumping especially in connection with light gases,” says Martin Füllenbach, about the new line of turbo molecular pumps.
The maintenance and oil-free hybrid bearings with lifetime lubrication make regular maintenance by way of oil changes superfluous. The bearing system ensures low vibration and low noise operation - thereby being less demanding with respect to applications which are sensitive to vibrations. The ceramics ball bearings are replaceable on-site should this be required.
Additional interface options are available upon request.
A flexible and comprehensive range of accessories supplements the new product line. It comprises among other things cost-effective power supplies for 100 V to 240 V mains supplies (either on-board or stand-alone), adjustable air or water cooling units, heating jackets, venting and purge gas accessories (actively controlled, passive) as well as installation and mounting kits which assist commissioning.
Edwards’ big vacuum pump enhances performance
State-of-the-art technology improves gas flow capability and high temperature management to prevent powder deposition
Edwards Limited, a manufacturer of sophisticated vacuum products and abatement systems used in MOCVD manufacturing, has introduced the STP- iXA4506.
This is a large-capacity turbomolecular pump (TMP), designed to deliver significant savings for cost-sensitive manufacturers of semiconductors, flat panel displays, LEDs and solar panels.
TURBOVAC multi-inlet
The thermal design of the TURBOVAC i ensures optimum cooling of the bearings. To protect the bearings against critical gases or particles, all pumps have been equipped with a purge gas connection. Oerlikon says this increases the service life of the pump and system uptime.
The TURBOVAC i family offers numerous options for fulfilling a wide range of different requirements. Both the TURBOVAC 350 i and also the 450 i are available with an additional interstage port allowing pumping down of an additional chamber.
In order to keep installation, operation and maintenance as simple as possible, the TURBOVAC i is equipped with a rotatable vacuum flange connection, integrated drive electronics with direct 24/48 V DC supply as well as a flexible communication interface with USB, RS 485 and digital I/O ports.
STP-iXA4506
“The new STP-iXA4506 turbo pump is the all-in-one solution with improved pumping performance,” states Shinichi Yoshino, TMP Product Marketing Manager, Edwards.“It pairs Edwards’ latest rotor design with the well-established, highly reliable, on-board controller of the iXA series, to maximise the allowable gas throughput and, hence, minimise the number of pumps required for high-flow processes, particularly in solar and flat panel applications.”
Yoshino continues, “The fully-integrated controller March 2014
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