Page 78
www.us-tech.com
July, 2012
PI: XYZ Nano-Positioning Stage for 3D Laser Lithography
Auburn, MA — Piezo nano-position- ing systems specialist PI (Physik Instrumente) provides a 3-axis nano- positioning stage that is used in a novel laser lithography sys- tem by Nanoscribe GmbH. The lithography system can produce complex 3-dimen- sional structures, fully automatically and repeat- ably with a precision and flexibility that had previ- ously been unavailable. Sub-micron structures with sizes of up to 1mm and widths to 150nm are feasi- ble with this system. The driving force of
Nanoscribe’s laser lithogra- phy system is a PImars P- 563 flexure-guided, piezo- driven nano posi tioning XYZ stage from PI. It provides positioning ranges to 300 x 300 x 300µ and nanometer range repeatability. A par- allel-metrology position feed back system based on highly linear capacitive sen- sors is integrated and allows the sam- ple to be moved precisely and repeat- edly in relation to the laser focus. A digital piezo motion controller pro- vides the necessary path control on a nanometric scale. The high accuracy and fast
response of the piezoelectric nano positioning stage makes it possible to equip surfaces with particular bio- metric characteristics or to create
microstructures for small pumps and needles.
Typical applications for 3D laser lithography are the creation of
Nanopositioning system.
three-dimensional structures for cell biology.
Contact: PI (Physik
Instrumente) L.P., 16 Albert St., Auburn, MA 01501 % 508-832-3456 fax: 508-832-0506 E-mail:
info@pi-usa.us Web:
www.pi-usa.us
See at Semicon West Booth #1025.
More info at
www.CH2.cirris.com
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32 |
Page 33 |
Page 34 |
Page 35 |
Page 36 |
Page 37 |
Page 38 |
Page 39 |
Page 40 |
Page 41 |
Page 42 |
Page 43 |
Page 44 |
Page 45 |
Page 46 |
Page 47 |
Page 48 |
Page 49 |
Page 50 |
Page 51 |
Page 52 |
Page 53 |
Page 54 |
Page 55 |
Page 56 |
Page 57 |
Page 58 |
Page 59 |
Page 60 |
Page 61 |
Page 62 |
Page 63 |
Page 64 |
Page 65 |
Page 66 |
Page 67 |
Page 68 |
Page 69 |
Page 70 |
Page 71 |
Page 72 |
Page 73 |
Page 74 |
Page 75 |
Page 76 |
Page 77 |
Page 78 |
Page 79 |
Page 80 |
Page 81 |
Page 82 |
Page 83 |
Page 84 |
Page 85 |
Page 86 |
Page 87 |
Page 88 |
Page 89 |
Page 90 |
Page 91 |
Page 92 |
Page 93 |
Page 94 |
Page 95 |
Page 96 |
Page 97 |
Page 98 |
Page 99 |
Page 100 |
Page 101 |
Page 102 |
Page 103 |
Page 104