May, 2020


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Page 69 The Importance of Inspection and Metrology... Continued from page 66


application. Either way, given that the systems can provide more than just a pass/fail report, cus- tomers value the x/y/z dimensions and how they can use these measurements to improve process control.


Overall, the company is enabling significant


improvements in yields, quality, process control, and operational efficiencies in its customers’ man- ufacturing facilities.


Micro LED Technology Another exciting growth area in the industry


is micro LED. CyberOptics has collaborated with Rohinni, a company at the forefront in the indus- try. The innovation behind this flexible lighting technology is extraordinary. This disruptive tech- nology enables products that are brighter, thinner, lighter, and more dynamic than those currently on the market. In addition, it uses less power than LCD or OLED. This exciting market is well positioned to grow in the com- ing years. Rohinni is going to enable some


very interesting commercial applica- tions in consumer electronics devices. Micro LEDs developed using Roh - inni’s technology can also be deployed in automotive applications, outdoor signage and other applications. A pri- mary focus at this time is the back- light for LCD displays. Today, back- lights use LEDs. Switching over to micro LED offers less power consump-


enables highly accurate, dual-sided final vision inspection and can double productivity.


There are roughly 120 to 130 memory lines in


the world today. The majority of them belong to three large manufacturers — Samsung, SK Hynix and Micron, with a few others belonging to small- er players. That overall number is growing at approxi-


mately a 10 percent run rate, due to the demand for memory. MRS and Semiconductor Sensors


To further strengthen its position in the semi-


MX3000 inline memory module inspection and metrology system.


conductor market, the company expanded its family of semiconductor sensors with two new products. The first is the wireless WaferSense® Auto Resistance Sen sor™ (ARS™), which enables real- time resistance measurements of plating cell con- tacts in semiconductor electrochemical deposition applications for tool set up and diagnostics. The other recent launch is the Inline Particle Sensor™ (IPS™) that detects particle contami-


Continued on page 71


CyberOptics’ Inline Particle Sensor (IPS) detects particle contaminants in the gas and vacuum lines of semiconductor processing equipment.


tion and greater light intensity. CyberOptics has been scaling up and deploying its inspection and metrolo- gy systems for this application to max- imize yields and improve processes and productivity. Rohinni is currently using


Cyber Optics’ systems for six critical inline production process locations, including incoming quality inspec-


Advanced packaging involves extremely thin


chips and the cost of failure can be high, making inspec- tion critically important.


tion of the flexible circuits, SPI, pre- and post-reflow AOI, coordinate measurements after placement of the LED die, and final test. The company selected CyberOptics’ MRS-enabled SQ3000 based on its performance and versatility, high accuracy and high resolution at high speed with its inline CMM functionality. The company recently extended


its portfolio of memory module inspection and metrology systems from 2D to 3D with the launch of its MX3000™ system. With two high- resolution MRS sensors, the system

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