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September, 2019 Smart Hybrid Actuators Combine
Precision, Force and Travel Range with High Dynamics
By Oliver Dietzel, Team Leader for Project Management, Corporate Platform Development, PI (Physik Instrumente) GmbH
detected with high precision and moved repeatedly over long travel ranges, or when a target position needs to be reached with nanometer precision. Applications areas include pre cision movement of telescopes, meas uring technology or surface in - spection, semiconductor manufac tur - ing, microscopy, and laser technology. Hybrid drives combine two dif-
T
ferent drive concepts into a high-per- formance and precision positioning system. They take advantage of both drives. These types of solutions are always in demand when one drive alone is not in a position to meet all of the requirements of an application. An example of this is nanome-
ter-precision positioning of heavy loads over long travel ranges. Nanopositioning systems that com- bine piezo drives with classical drive screws offer a practical solution, but other drive designs are also possible. Examples of applications for hybrid drives range from semiconductor manufacturing through quality assurance and optical inspection to biomedical engineering.
he characteristics of hybrid drives present a practical solu- tion when a position needs to be
Hybrid Electric Motor and Voice Coil
Various concepts have already
been developed and implemented for hybrid positioning systems. One solution is a combination of linear
motors and voice coil actuators. Linear motors offer long travel ranges with high positioning accura- cy and repeatability, but do have the disadvantage of high friction in the linear guides used for taking up the
load. Nevertheless, voice coil actua- tors provide precision positioning, as well as good force control and smooth motion. However, their travel range is limited to 4 in. (100 mm) and they can only hold loads at rest when they are powered on.
Hybrid Piezo Walking Drive and Actuator
PI has already successfully
developed and established another hybrid drive for other applications, such as semiconductor inspection. A PiezoWalk® drive that offers long travel ranges with high stiffness is combined with a PICMA® actuator for highly dynamic applications. The advantage in this case is, depending on the design of the PiezoWalk drive, the drive offers high holding forces. In this case, the high dynamics of the PICMA drive are important for fast focusing of the object to be scanned.
Hybrid Electric Motor with Piezo Actuator
PI is currently working on a
PI has designed a hybrid motor drive screw combined with a piezo actuator to move the massive mirrors that the European Extremely Large Telescope (ELT) requires, with positional accuracy of ±2 nanometers.
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SH 31 32 33 34 35 36 37 38 39 40 41 42 43 44 21 22 23 24 25 26 27 28 29 30 5 6 7 8 9 10 11 12 13 14 15 16 2 3 1-6-18 10:57 AM
project together with engineers and astronomers from the European Southern Observatory (ESO), which
Continued on next page
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