Equipment and Materials ♦ news digest


Mark West, Sales Manager for Imtec, stated that the Accudry IPA dryer fits in well with its current extensive offerings of wet process modules that it has been providing to the semiconductor and related industries for almost 40 years. “We see a growing market for IPA dryers”, continued West.


Some customers just want to get away from the problems associated with spin rinser dryers. Others are processing fragile substrates, such as solar cells or III-V materials. Others have high aspect ratio structures that trap water and cause die-killing water spots. The Accudry is claimed to be a perfect solution for all these requirements.


Imtec’s patented IPA drying technology is simple, effective, and easy to implement. Its stand-alone dryer (ADS-XXXX) is designed to fit in the same space as a typical spin dryer. Programmable IPA vapour and N2 flow rates allow for recipes to be optimizsd for different substrates and surface conditions to be processed in the same dryer.


Thermal Microreactor has a new view


The CATLAB tool controls temperature and ramp rate, gas stream selection and flow rates from up to eight gas streams used in compound semiconductor manufacturing.


Hiden Analytical has just revealed the CATLAB thermal microreactor system with the new CATsoft LabVIEWbased operating program to further optimise and simplify operation in both Quality Control and R&D applications.


3D Bar Mode


The benchtop CATLAB integrated system is uniquely manufactured by Hiden which has over 20 years proven expertise in both thermal analysis and in mass spectrometry.


Tiger Optics’ new gas analyser pounces on contaminants


In order for customers to meet targets for the 15-year International Technology Roadmap for Semiconductors, they need to monitor their process gases at ever increasing levels of purity.


Expanding the capabilities of its patented CW- CRDS technology, Tiger Optics has plans to introduce the LaserTrace 3 trace gas analyser at the Semicon West trade show in San Francisco.


August/September 2011 www.compoundsemiconductor.net 179 CATLAB Microreactor Module


Designed for precise characterisation of catalytic and of general thermal reaction studies, the system features a 1000C fast response furnace with integrated mass spectrometer and is fully programmable for both automated and manual operation with the CATsoft program controlling furnace temperature and ramp rate, gas stream selection and flow rates from up to eight gas streams, mass spectrometer function and data processing.


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