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news digest ♦ Equipment and Materials


“Sub-Fab” solution that they will offer to end user customers and OEMs alike. The Sub-Fab solution is a totally integrated system that includes vacuum and abatement technologies, and an onboard environmental control panel feature developed by Steed Technology.


By combining these technologies into a packaged, turnkey product, customers will no longer have to piece together vacuum and abatement systems from separate technology providers, and will be able to purchase process vacuum pumps and exhaust abatement equipment as a totally integrated system through a single vendor.


Continuing the Highvac model of local support centres is a key ingredient when it comes to providing customers the services required to maintain mission-critical manufacturing lines in a highly responsive manner. Support centres will be expanded throughout the U.S. and globally, including Taiwan , Korea , China , Singapore and Europe as efforts are aggressively ramped up to support customers demand for process vacuum and abatement technologies.


An additional aspect of the merger is the creation of Steed’s Green Consulting Service. The merger adds considerable value to this consulting service with the addition of the Highvac “Vacuum Pumping Solutions” team, which boasts a combined 50 years of Gas Abatement and Vacuum Equipment experience.


With new, increasingly strict, environmental regulations such as the “Greenhouse” law (AB32), many companies in the Semiconductor, LED, Solar and other industries are closely examining ways to increase the effectiveness and efficiency of their current abatement systems. There is little doubt environmental control will play a major role in these industries in the years ahead, and to assist companies in making the transition to cleaner, more efficient manufacturing technologies Steed will offer Green consulting and solutions services. These will help companies dramatically reduce emissions of gases such as Perfluorocarbons, NOxand CO2. Steed’s Green Consulting hopes to provide a fast- track to compliance for companies struggling to comply with local and federal laws, while offering significant savings through the reduction of consumed utilities such as fuel and water.


174 www.compoundsemiconductor.net August/September 2011


“This is certainly a win-win for both Steed and Highvac, and even more so for our existing and prospective customers,” said Gerry Catalano, President and CEO of Steed Technology. “The companies we serve face steep and complex challenges when forced to work with separate vendors to piece together environmentally responsible solutions to the toxic and harmful exhaust created in their manufacturing process, while at the same time trying increase machine up-time. High tech companies will face tougher standards in the future and will need advanced vacuum and abatement equipment to be in compliance with regulations and provide the maximum up-time.”


“With this merger, we look forward to the new capabilities we can bring to our customers through expanding our scope of supply with the EcoGuard Abatement system. Vacuum Pumps and PoU Abatement are a perfect product mix, and Steed’s products are a direct extension that adds considerable value to the core products and services that we have offered to our customers for the past 18 years. Additionally, the added scope enables us to expand into geographical regions and bring Highvac’s proven model of being a ‘Local Vendor’ to our new customers,” says John Catalano President and CEO of Highvac Corporation.


SEMI-GAS Systems safely supply hazardous gases


The firm’s latest bulk specialty gas source systems, which can be used in compound semiconductor manufacturing, provide flow rates of up to 1,000 slpm.


SEMI-GAS Systems, a division of Applied Energy Systems (AES) and a manufacturer of ultra-high purity gas source and distribution systems, has unveiled a new series of bulk gas source systems that safely deliver hazardous specialty gases from large vessels at high flow rates.


The source systems are designed to supply toxic gases such as those used in compound semiconductor manufacturing. For example, NH3which is used to make LEDs, SiH4which is used as a dopant in III-V compounds, and H2which is used as a carrier gas in MOVPE growth. The


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