news digest ♦ LEDs
process by offering a common platform for solvent, acid and ozone applications. And with the smallest cabinet footprint (1.78m2) among similar equipment, SAT/SOT saves fab-floor real estate while its convenient side access makes routine maintenance checks both safe and user friendly.”
Back in 2009, SOT’s HydroOzone post-ash clean was honoured with SEMICON West’s “ Sustainable Technologies Award”. The tool is claimed to eliminate thousands of gallons of sulphuric acid and hydrogen peroxide and reduce deionised water consumption by 84 percent. OEM Group says it also reduces cycle time and defects and increases yield.
OEM Group’s customer, an international supplier of LEDs for display, backlighting, automotive and general lighting applications, says it chose Cintillio SAT and SOT “because of the systems’ flexibility to handle both resist strip as well as organic cleaning after etching,” Forgey adds. The systems will support the LED manufacturer’s 150mm wafer production.
“Like so many chip makers we’ve talked with since we acquired the Cintillio portfolio last May, our LED customer was particularly impressed by the cost-effective high throughout potential of SAT and SOT. Because of Cintillio’s semi- automated batch-system capabilities, numerous wafer lots may be processed simultaneously. And that saves fabs time and money,” OEM Group CEO Wayne Jeveli, says.
The Cintillio line also includes the single- and dual-chamber Spray Solvent Tool (SST) with one, two or three chemical system configurations that accommodate most solvent-based process applications.
Cintillio is the eleventh product line addition to OEM Group’s LEGENDS portfolio, which was launched at SEMICON West in 2008.
“Since our debut, LEGENDS systems have steadily expanded their reputation as field-proven and game-changing for both established semiconductor markets and emerging-technology innovators,” Jeveli says.
“The spray system manufacturing expertise we gained through last year’s (Applied Materials/Semitool) acquisition bolstered LEGENDS’ value proposition by adding cutting-edge and proven dry-in/dry-out wet chemical process technology that optimises our customers’ processing times and return on investment,” he concludes.
it says, are record efficiencies of ultraviolet light (UV) LEDs operating in the germicidal UV-C range.
UV Germicidal LED lamps with the power to disinfect water, surfaces and air
SETi breaks barriers with UV-C LED efficiencies of over 10%
Bringing consumer disinfection markets within reach, SETi has developed a completely new p-type region using doped transparent aluminium gallium nitride. This, together with a transparent p-contact, significantly increases extraction efficiencies
Sensor Electronic Technology, Inc (SETi) has achieved, what 64
www.compoundsemiconductor.net April/May 2012
Literature says that the UV-C range peaks at around 254nm although the latest LEDs developed by SETi have been designed to emit at 278nm. The firm’s latest devices have an external quantum efficiency of 11% with a corresponding wall-plug efficiency of 8%. SETi says this is an “industry beating result”. It was achieved under the DARPA Compact Mid-Ultraviolet Technology (CMUVT) program and performed in collaboration with Army Research Laboratories (ARL). This latest development represents more than a five times improvement in performance. Traditionally, UV LEDs have been manufactured with GaN p-layers, due to the difficulties of p-doping AlGaN materials. However, GaN absorbs wavelengths shorter than 365nm, reducing the extraction efficiency of UV LEDs operating at short wavelengths. SETi has now developed a completely new p-type region using doped AlGaN, which is transparent, even in the UVC range. This coupled with a transparent p-contact significantly increases extraction efficiencies. The firm has also enhanced its proprietary MEMOCVD growth process to reduce dislocation densities in the quantum well structure of UV LEDs grown on sapphire substrates. The company has demonstrated threading dislocation densities of less than 2 x 108, as measured by TEM. This improvement leads to a high internal quantum efficiency of 60%. “This milestone is a very exciting development of UV LEDs, and represents a major step forward in reaching efficiencies of incumbent technologies, such as medium pressure mercury vapour lamps, which typically operate at efficiencies of 15% or less,” notes Remis Gaska, President and CEO of SETi. The 350µm x 350µm encapsulated LEDs were designed for emission at 278nm and measured independently at ARL. SETi says the emission of 9.8mW at 20mA is the highest value ever reported for an LED shorter than 365nm at this forward current, and 30mW at 100mA. Details of the research will be presented at CLEO 2012 meeting, San Jose, California. SETi has previously reported LED based water treatment systems that disinfect with over 4 log reduction drinking water flowing at 0.5 litres per minute with less than 35mW of optical power at 275nm. The results from this development put UV LED disinfection systems within the reach of consumer markets for applications such as point of
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32 |
Page 33 |
Page 34 |
Page 35 |
Page 36 |
Page 37 |
Page 38 |
Page 39 |
Page 40 |
Page 41 |
Page 42 |
Page 43 |
Page 44 |
Page 45 |
Page 46 |
Page 47 |
Page 48 |
Page 49 |
Page 50 |
Page 51 |
Page 52 |
Page 53 |
Page 54 |
Page 55 |
Page 56 |
Page 57 |
Page 58 |
Page 59 |
Page 60 |
Page 61 |
Page 62 |
Page 63 |
Page 64 |
Page 65 |
Page 66 |
Page 67 |
Page 68 |
Page 69 |
Page 70 |
Page 71 |
Page 72 |
Page 73 |
Page 74 |
Page 75 |
Page 76 |
Page 77 |
Page 78 |
Page 79 |
Page 80 |
Page 81 |
Page 82 |
Page 83 |
Page 84 |
Page 85 |
Page 86 |
Page 87 |
Page 88 |
Page 89 |
Page 90 |
Page 91 |
Page 92 |
Page 93 |
Page 94 |
Page 95 |
Page 96 |
Page 97 |
Page 98 |
Page 99 |
Page 100 |
Page 101 |
Page 102 |
Page 103 |
Page 104 |
Page 105 |
Page 106 |
Page 107 |
Page 108 |
Page 109 |
Page 110 |
Page 111 |
Page 112 |
Page 113 |
Page 114 |
Page 115 |
Page 116 |
Page 117 |
Page 118 |
Page 119 |
Page 120 |
Page 121 |
Page 122 |
Page 123 |
Page 124 |
Page 125 |
Page 126 |
Page 127 |
Page 128 |
Page 129 |
Page 130 |
Page 131 |
Page 132 |
Page 133 |
Page 134 |
Page 135 |
Page 136 |
Page 137 |
Page 138 |
Page 139 |
Page 140 |
Page 141 |
Page 142 |
Page 143 |
Page 144 |
Page 145 |
Page 146 |
Page 147 |
Page 148 |
Page 149 |
Page 150 |
Page 151 |
Page 152 |
Page 153 |
Page 154 |
Page 155 |
Page 156 |
Page 157 |
Page 158 |
Page 159 |
Page 160 |
Page 161 |
Page 162 |
Page 163 |
Page 164 |
Page 165 |
Page 166 |
Page 167 |
Page 168 |
Page 169 |
Page 170 |
Page 171 |
Page 172 |
Page 173 |
Page 174 |
Page 175