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etcher and deposition tool can have many configurations, including the ICP and PECVD options ordered by IISc.
The two ICP-RIE systems and the PECVD systems have been configured for the widest range of processes required at CEN, IISc, which is a multi- user national facility. The etch chemistries include the capability to etch poly-silicon, silicon oxide, silicon nitride and a variety of metals. In addition to the silicon processing, the tools are also configured for GaAs and GaN process capability for high speed, high frequency power transistors. The PECVD system enables stress engineered nitride for MEMS sensors, low temperature oxide and very thick poly-silicon membrane as a structural material for inertial sensors.
Comments Prof.Navakanta Bhat from the Department of Electrical Communication Engineering at IISc, “We chose to order Oxford Instruments’ systems for their superior process uniformity, and the high level of support offered by the company. We were particularly impressed by the technical capabilities of the staff and their willingness to work with their customers, considering the customer as a partner.
Our new facility will be one of its kind in the country with a 14,000 sq.ft clean room in a new building (90,000 sq.ft) for the Centre for Nano Science and Engineering (CeNSE). The state of the art clean room will house the best tools, catering to the diverse needs of researchers, and the Oxford Instruments’ systems offer the breadth of processes and leading edge technology we need. Oxford Instruments’ systems will enable IISc to carry out frontier research in a number of areas, including Nanoscale electronics and MEMS and help achieve our aim of creating technologies that can be commercially exploited by industry.”
Mark Vosloo, Sales & Customer Support Director for Oxford Instruments Plasma Technology is delighted with this order, “This second order in a year from an important Indian Research Institute results from our ability to meet our customers’ needs through advanced technology and service, while having the experience for them to be able to rely on our innovative world class products.”
Bridgelux announces expansion of its LED Arrays portfolio for the $10 billion LED retrofit bulb market
Bridgelux Inc., a developer and manufacturer of LED lighting technologies and solutions today announced the expansion of its portfolio of award- winning LED Arrays to include new high efficacy products that meet the price and performance demands of the $10 billion LED retrofit bulb market opportunity.
Featuring a broad product portfolio, industry leading light output performance, superior color quality and high efficacy across the white color spectrum, Bridgelux is now delivering high brightness, energy efficient light for both low and line (mains) voltage products to simplify system design and integration for lamp manufacturers.
The Bridgelux LS Array Series now includes options designed specifically for low voltage lighting. The new miniaturized LS arrays enable both diffuse and directional light sources for applications including landscape lighting, residential lighting, track lighting, MR16 lamps and other 12 volt retrofit light bulbs. Delivering between 240 and 360 lumens in warm and cool white, these products are ideal replacement options for low wattage halogen and incandescent lamps.
The Bridgelux ES Array Series has also been expanded to include new voltage options for both cool white and warm white to better enable the A-line and decorative lamp markets. The new ES arrays take advantage of existing electronic drivers to facilitate rapid new lamp and luminaire product introductions.
“As governments around the world rapidly move to eliminate inefficient incandescent lamps the demand is growing for LED replacement lamps that can deliver the quality of light required by consumers,” said Jason Posselt, Bridgelux vice president of marketing. “These new arrays deliver high quality light while simultaneously helping our customers reduce design complexity and product cost for this price sensitive market.”
October 2010
www.compoundsemiconductor.net 119
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