Page 58 Continued from page 50
But Liu notes that it also contributed several important maintenance and quality advantages.
More Uptime “By employing inverted linear
motors in the Gen II design, the mag- netic plate is integrated into the car- rier. This way, the coils, electronics and cabling are located outside the process chamber. Servicing the sys- tem is much faster, because all that remains inside the chambers of the Gen II system are simple rails for the carriers to ride on. There are no com- plex alignment maintenance proce- dures involved, and because there are no mechanical drive components to cause problems, the mean time between needed service is much improved,” Liu emphasizes. Another benefit of the LMS is
that the drive mechanism does not rely on friction to drive the carriers from station to station, eliminating a possible source of contaminants that could cause defects.
Partnering to Improve Technology
To create the new transport
mechanism, the Bosch Rexroth Tech Center West in Pleasanton, CA, worked with the Intevac team during all phases of the project — from defining requests to developing ini- tial control technology and hard- ware, and finally, implementing test- ing and system optimization. The dedicated high-tech applications group provided face-to-face support at critical phases of the project, with Rexroth application engineers writ- ing control code and tuning motors.
www.us-
tech.com
April, 2011 Linear Motion System Speeds Hard Disk Production At the prototype stage, Rexroth
application engineers determined proper coil and sensor placement and control programming to regulate the rate of carrier acceleration/decelera- tion and to ensure vibration-free movement of the carrier during hand-offs between chambers.
Custom Design Assembly When the first 200 Lean Gen II
system shipped in 2008, Tech Center West provided a custom control enclosure to meet SEMI standards. Intevac’s customer needed seven enclosures for the 72-volt drive com- ponents to meet safety requirements — one enclosure per module. The 200 Lean Gen II system ships in seven modules: one front and one rear mod- ule, plus five process modules, each containing four process chambers or
stations. The enclosure for each mod- ule houses a Rexroth NYCe 4000 node with a backplane, two drives, and two multiplexing units to control four linear motors. The Tech Center created drawings and devised one enclosure design for three mounting variations, complete with strain- relief cables, and had the enclosures fabricated to fit the 200 Lean sys- tem’s compact footprint. Today, Bosch Rexroth expedites
production of 200 Lean Gen II sys- tems by delivering the LMS assem- bly fully wired and tested. After Intevac sells a system, a Rexroth support team is available as needed to support Intevac’s customers. The NYCe 4000 motion control
incorporates real-time motion control functionality, enabling real-time diag- nostics. “Data is accessible on carrier
acceleration, individual coil history, position following errors, and other important variables, which makes it easy for Intevac to optimize the system or to customize it if needed,” Liu says. “Our relationship with Bosch
Rexroth is a partnership,” Liu con- tinues. “Given our process chamber geometry, we wanted to see if a lin- ear motion system could meet the needs of the process, plus provide flexibility for other hard disk media. The Rexroth team came through — not just as a component vendor, but as a solutions provider.” Contact: Bosch Rexroth
Corporation, 816 E. Third St., Buchanan, MI 49107 % 616-697-5295 fax: 616-695-5363 E-mail:
info@boschrexroth-us.com Web:
www.boschrexroth-us.com or
www.intevac.com r
Vacuum Bonding for High-Yield Production
Continued from page 51
that are added to the adhesive. These solid particles are homogeneously dis- tributed throughout the thermally conductive adhesive and determine the width of the gap across the inter- face between the two objects. The size of the grains defines the distance.
Piston Metering Needed However, not all dispensing sys-
tems are capable of carrying out this process. The ideal systems for the task are piston metering heads that are designed for handling large grains contained in the dispensing mass and suited for abrasive and
highly filled adhesives even in long- term operation. This processing technique pre-
cludes the need for costly stamping presses while reducing the danger of cracking the dies due to unevenly applied pressure. Another advantage: the circuit board design is less restricted, because no surfaces are needed to place the pressure pins. At the same time, the process eliminates the risk of damaging the circuit board or the mounted electrical components and conductive pathways. Further - more, the dispensing technology com- bined with subsequent vacuum bond- ing allows cycle times comparable to
those achieved with pressure stamp- ing, because of the small size of the vacuum box. This lets the air be evac- uated and reintroduced within the shortest possible time. Using extremely filled thermal-
ly conductive adhesives followed by air-bubble-free vacuum bonding with a reserved interface distance, effec- tive heat management can be achieved at production quality levels previously unknown. Contact: Scheugenpflug, Inc.,
2125 Barrett Park Dr. NW, #104, Kennesaw, GA 30144-3613 % 770-218-0835 Web:
www.scheugenpflug-usa.com r
See us at APEX Booth 1882
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