news digest ♦ Equipment and Materials
very best training, in order to ensure machines are maintained and used to their full capabilities. While Oxford Instruments offers extensive Customer Support maintenance & service packages, it is always beneficial for customers to have enough knowledge to maintain and run their own machines on a day-to-day level. These courses aim to assist Customers in achieving this.
The new course schedule includes training on PlasmaPro System 80/800, PlasmaPro System 100/133, PlasmaPro NGP 80, PlasmaPro NGP1000, plus the HINE/EMS Robotic transfer arm, and End point detection.
Pete Hunt, Oxford Instruments Customer Service and Support Manager comments, “As a leader in system manufacture for both the Production and R&D markets, we realise the importance of machine maintenance and uptime. Our courses are designed to improve process knowledge and system maintenance techniques for engineers and technicians. They are given by our experienced Training Officer, Nick Curtis, with the support of the Company’s process and system engineers, who not only know the systems but understand our Customers’ individual requirements.”
OIPT says customer feedback on training has been excellent, with participants finding both the theory and practical sessions beneficial and well organised. As Hilary Tanner of L-3 EOS commented, “You supplied good, solid, thought- provoking information”
In order to provide the very best training packages, course numbers are limited so that participants gain a real insight at first hand into the machines.
Johnson Matthey purge systems popular in U.S. and Europe
China and Taiwan are still the largest markets for the firm’s products used in compound semiconductor manufacturing. JM expects its GPT PureGuard V-Purge System sales to be strong in 2012 based on the fact that long-term LED market opportunities remain very positive.
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www.compoundsemiconductor.net November/December 2011
Johnson Matthey’s Gas Purification Technology (GPT) group announced that 2011 sales of its PureGuardTV-Purge System to compound semiconductor manufacturers are up in the U.S. and Europe.
Johnson Matthey, a designer, manufacturer and distribution of point-of-use gas purification equipment to the global electronics industry, has shipped its PureGuard V-Purge Systems, hydrogen purifiers and other offerings to new and expanding fabs for sensitive semiconductor and analytical applications, including compound semiconductor, crystal growth and PV deposition processes.
“While China and Taiwan are still the largest markets for our products,” said Jeff Lucht, GPT group Business Manager, “V-Purge System sales are strong in the U.S. and Europe. These systems are designed to meet the needs of today’s largest MOCVD production platforms, particularly for manufacturing high brightness (HB) and other types of LEDs.”
Lucht said that he expects GPT PureGuard V-Purge System sales to be strong in 2012 “based on the fact that long-term LED market opportunities remain very positive.”
The V-Purge System enhances the performance of Johnson Matthey and other hydrogen purifiers for higher flow rates typical in production fabs. The patented system employing palladium membrane technology offers flow rates between 1 and 200 slpm and removes water, oxygen, carbon monoxide, methane, nitrogen, carbon dioxide and THC to produce the purest possible hydrogen.
The system provides heat management capable of handling any flow change, superior protection from power failure and pressure surges and can switch from full nitrogen to full hydrogen immediately. When the automated purge is activated, it takes the V-Purge System minutes to remove all hydrogen.
Earlier this year Johnson Matthey’s GPT group reported that 2010 Asia sales increased dramatically for its leading and highly reliable bulk and point-of-use PureGuard PSH Series hydrogen purifiers, thanks largely to the continuing rapid growth of LED production using MOCVD tools.
Lucht said the GPT group is committed to
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