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contamination problem,” says Butcher, Chief Scientist of Meaglow.


tool.


The nSPEC enables Kyma to inspect their wafers via powerful image analysis software. This includes the ability to store high resolution images, capture particular features and areas of interest while translating the acquired visual information into quantifiable data.


ALD system converted with a hollow cathode plasma source


Initial results show a significant reduction of oxygen content in compound nitride films grown. Results will be presented October 27th to November 1st at the 224th ECS Fall Meeting in San Francisco, California at an invited talk presented at the symposium on “Atomic Layer Deposition Applications”.


Meaglow is now focused on commercialising its hollow cathode plasma technology which also has the advantage of scalability to large deposition areas. Meaglow is seeking additional ALD system owners and suppliers interested in removing the oxygen contamination in their films.


Kyma uses Nanotronics tool


to classify defects in GaN The newly installed inspection system will be used in the characterisation of Kyma’s growing III-nitride semiconductor materials product line


In May of 2013, Nanotronics Imaging installed an nSPEC system at Kyma Technologies in Raleigh, North Carolina.


nSPEC data: a) Density map of all defects ; b) Examples of some of the defects on the map compared to microscope images ; c) Histogram showing quantities of each defect size


nSPEC system


Kyma and Nanotronics began discussing how the nSPEC tool might benefit Kyma’s nitride semiconductor materials production effort in early 2013. A collaborative partnership was quickly spawned which led to Kyma’s purchase of the nSPEC


80 www.compoundsemiconductor.net August/September 2013


“Working with the Nanotronics Imaging team has been an exciting and highly productive experience,” says Keith Evans, Kyma’s president & CEO. “Our technical team, led by our Chief Scientist Jacob Leach, pushed the nSPEC tool in about a dozen different directions. The response of the Nanotronics team was superb and the result is that we can now routinely sense several different important characteristics of our materials better than ever before.”


He adds “We are very pleased with the kinds of inspection that the nSPEC is giving us, which has already given us significant new insight into our processes here at Kyma.”


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