news digest ♦ Equipment and Materials
Such ‘integrated power supply’ TMP would enable a reduction in the number of parts for manufacturing equipment, and enable reductions in costs.
Shimadzu Corporation already sells the TMP-V series of pumps with integrated power supplies for pumping inert gases used in sputter systems for ‘light processing’. The TMP-X series were developed for pumping corrosive gases used in etching equipment - so called ‘hard processing’.
This series will offer pumping speeds from 300 L/s to 4000 L/s to address the multifaceted needs of semiconductor and flat panel display manufactures.
According to Shimadzu, the main features of the TMP-X
series are listed below. 1. Industry’s most compact TMP with an integrated power supply.
Redesign of conventional integrated power supply TMP enabled a 15 percent reduction in the height of the new pump whilst maintaining the pumping performance. Also, the TMP-X pumps are almost the same size as the main body of conventional TMP with separate power supply cables that are used for hard processing.
Pumps in the TMP-X series do not require racks and cables - as is the case in conventional separate power supply TMP - thus this series offers a greater degree of freedom in the design of low cost, small footprint manufacturing equipment.
2. Cope with hard processes employing corrosive gases The incorporation of a pump temperature control function and improvement of the motor power output has enabled the use of the TMP-X series of pumps for manufacturing processes involving high gas flow rates and reactive gases.
What’s more, Shimadzu Corporation have continued to employ anti-corrosive coating and dynamic seals in the new pumps, thus preventing erosion of the TMP and ensuring high reliability even for hard processes employing highly corrosive gases.
3. Low power consumption
The use of a newly developed power unit and high efficiency motor has enabled a 15% reduction (under conditions of zero load) in the power consumption compared to conventional turbo molecular pumps. This series of TMP have a low load impact on the environment.
Magnetic bearing type integrated turbo molecular
pump specifications Prices:
TMP-X2905 series 5,100,000 JPY (excluding tax) TMP-X3405 series 5,500,000 JPY (excluding tax) Szes:
TMP-X2905 series (VG250) f350 ´ H458 mm 115kg TMP-X3405 series (VG300) f400 ´ H395 mm 89kg
The firm plans to sell 500 units of its TMP-X2905/X3405 in the first year.
Mega Fluid Systems appoints industry specialist as President
MMega Fluid Systems, Inc., has appointed Delton Hyatt as President. Hyatt brings 30 yyyears experience in high purity thin film processing, semiconductor fabrication support, aand process gas, slurry, and chemical delivery.
Hyatt’s management experience and extensive industry knowledge, particularly in chemical and gas equipment, will provide Mega with the strong foundation necessary to continue on the path of becoming the world leader in chemical and slurry equipment,” said Kevin Brady, CEO.
Delton began his career in business development at MKS Instruments, eventually becoming President of the Advanced Product Integration Division. He later joined the Mega Fluids (Chempure) subsidiary of Celerity (Kinetics) as the VP of Marketing, and eventually General Manager. Delton also served as the CEO of Zeihm Imaging and recently was involved in business acquisitions and integration for M+W and Total Facilities Solutions.
Mega Fluid Systems offers unsurpassed excellence in engineering, manufacturing, and testing capabilities. Mega’s partners benefit from high-level customer service and support from its program management, sales, engineering, service, and executive management teams.
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www.compoundsemiconductor.net August/September 2013
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