December, 2012
www.us-tech.com
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Nordson ASYMTEK Jet Dispensing System for MEMS Devices
Carlsbad, CA — New from Nordson ASYMTEK is its jet dispensing sys-
tem for wafer capping of MEMS. Jet dispensing can produce small, con- trolled, repeatable deposition of fluid and fine line widths of 0.3mm with sharp corners of 300µ for the sealing application. Wafer capping technolo- gy is used in MEMS devices such as inertial sensors, oscillators, and mi- crofluidic packages. Jet dispensing provides the flex-
ibility needed to apply sealant in var- ious shapes, especially for areas with geometric constraint or three dimen- sional structure surfaces. Sealant material, like silver paste, bonding
adhesive, UV curable material, or low-temperature solder, is applied to the MEMS wafer side. A cavity wafer covers the MEMS structure by bond- ing it to the MEMS die wafer, and the two bonded wafers are diced to- gether. The cover protects the wafer during the dicing process. Wafer capping can provide a
vacuum or low pressure using the de- sired material, and a hermetic, or al- most hermetic, seal can be realized. When the glass cap wafer is used with UV curable material, UV light penetrates the glass wafer to cure
the adhesive. The process controls on the
MEMS capping system ensure tight control of process variables such as fluid pressure, viscosity control, and volumetric control of the flow of the material for achieving the precise con- trol of sealant lines necessary due to
the delicate nature of the MEMS. Contact: Nordson ASYMTEK,
2762 Loker Ave. West, Carlsbad, CA 92010 % 800-279-6835 or 760-431-1919 fax: 760-431-2678 E-mail:
info@nordsonasymtek.com Web:
www.nordsonasymtek.com
Jet dispensing system for capping MEMS devices.
KIC Intros KICstart2
New
Generation Profiler
San Diego CA — KIC has launched its KICstart2, a new generation data acquisition profiler. The compact and cost-effective profiler takes advan- tage of the company’s easy-to-use graphical user interface. The profiler is designed for those users looking to quickly capture an accurate profile without all of the additional capabil-
HEIDENHAIN Absolute Encoders EQI 1331
HEIDENHAIN – expanding the horizons of medical science
into life-saving procedures
pinpoint precision
In advanced medical devices such as linear accelerators, HEIDENHAIN technology extends the reach of radiation oncologists deep into life-saving territory. HEIDENHAIN encoders provide critical position feedback that enables systems to compensate for biological movements, such as motion of the lungs, while custom shaping the highly targeted beam for maximal effectiveness.
1-888-790-9366
Next gen thermal profiler.
ities to optimize the process. Its ex- ceptionally low price makes it afford- able for almost any budget. A challenge with most profilers
on the market is not the lack of data being collected, but rather the ability to make sense of a large quantity of data. The KICstart2 uses the compa- ny’s powerful Process Window Index (PWI) concept to measure the quality of the profile with a single number. Most companies today are running lean and need equipment that is easy- to-use, with which operators and tech- nicians can be trained easily. The new thermal profiler uti-
lizes core technologies developed by KIC, and is supported by its world- wide organization. The patented de- sign concept automatically identifies the location of each oven heating zone, so few, if any, measurements are required. In addition, it automat- ically corrects for different thermo- couple (TC) locations on the part, aligning them for improved profile
graph viewing. Contact: KIC, 16120 W. Bernar-
do Dr., San Diego, CA 92127 % 858-673-6050 fax: 858-673-0085 Web:
www.kicthermal.com
1 1 10:06 AM
HEIDENHAIN Incremental Encoders ERN 1020
HEIDENHAIN Absolute Encoders EQN 1125
HEIDENHAIN Incremental Encoders ROD 1020
Image courtesy of Varian Medical Systems, Inc. All rights reserved.
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