Fab-wide epi process supervision EpiNet 2 with EpiGuard® technology: MOCVD Bay 1 EpiCurve 34-1298-2011
Connected Running...
In Spec MOCVD Bay 2 EpiCurve 34-1298-2011
Connected Running...
In Spec MOCVD Bay 3 EpiCurve 34-1298-2011
Connected Running...
Spec warning MOCVD Bay 4 EpiCurve 34-1298-2011
Connected Running...
Out of Spec
† Control and analysis software for advanced epitaxial processes
† Toolbox of diagnostic algorithms for all relevant process steps
EpiCurve® EpiCurve® EpiCurve® EpiCurve®
† Flexible configuration for epi fab-wide SPC (statistical process control) and FDC (fault detection & classification)
† Tight in-house control of your confidential recipes
LayTec AG | Germany |
info@laytec.de |
www.laytec.de/apc
Conference Chair Scott Sheppard
chairman@gaasmantech.org
Registration Chair Russ Kremer
registration@gaasmantech.org
Technical Program Chair Paul Cooke
tpcchair@gaasmantech.org
Local Arrangements Chair Alex Smith
local@csmantech.org www.csmantech.org 2014 INTERNATIONAL CONFERENCE Manufacturing technologies
of interest include: GaN, GaAs, InP, SiC,
Diamond, Sb compounds, SiGe, and other related materials
ABSTRACTS DUE OCTOBER 31, 2013 Send a 1- to 2-page abstract to:
abstracts@csmantech.org
Abstracts should clearly state: • The purpose of the work • How CS Manufacturing Technology was used or advanced
•
Specific results and how they were achieved with supporting data
Please use the abstract guidelines
found at
www.csmantech.org Please use U.S. fonts only
ON COMPOUND SEMICONDUCTOR MANUFACTURING TECHNOLOGY CALL FOR PAPERS
May 19th– 22th, 2014
Sheraton Denver Downtown Denver, Colorado, USA
Papers Are Solicited on
Manufacturing-Related Topics: PRODUCIBILITY
WAFER & DEVICE PROCESSING PROCESS CONTROL/YIELD EPITAXY& MATERIALS RF & POWER DEVICES OPTICAL DEVICES
EMERGING TECHNOLOGIES TEST & RELIABILITY
PACKAGING & INTEGRATION BUSINESS OUTLOOK EQUIPMENT
Workshop Chair Ruediger Schreiner
workshops@gaasmantech.org
Publicity Chair Mike Sun
publicity@csmantech.org
Exhibits Chair Drew Hanser
exhibitor@gaasmantech.org
University Liaison Jansen Yeuda
student.aid@
csmantech.org
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