Equipment and Materials ♦ news digest
tracing. All heat zones are independently controlled and employ redundant temperature measurement with over- temperature protection.
The standard two cylinder (2CE) model is 86” tall, 33” wide and 23” deep, including the external side-mounted heater controller enclosure. Various safety features come standard, such as a UL-approved fire sprinkler, a 1/4” thick safety glass window, a self-closing, self-latching door, and a stainless steel cylinder scale. Heavy cast aluminium cylinder brackets and adjustable cylinder shelves ensure safe and secure gas cylinder fit-up.
“We are pleased to be able to continuously offer new and versatile Xturion custom gas equipment solutions,” says Todd Bell, SEMI-GAS Systems’ engineering director and VaporX’s system designer. “Our customers work in a variety of industries with various gas requirements so we’ve created VaporX specifically for our customers who require delivery of low vapour pressure process gases.
SEMI-GAS Systems Xturion VaporX tool
VaporX is suitable for hazardous and non-hazardous gas applications and is designed to accommodate many of the low vapour pressure gases used in semiconductor, LED and solar cell production as well as in research and development and other high purity markets.
Xturion VaporX systems are available in one and two process cylinder models, each featuring a GigaGuard PLC controller and an ergonomically positioned 8” touch screen. The unit’s intuitive display schematics enable easy control over all the system’s operations including gas delivery, system alarms, automatic cylinder switchover and auto-purge capabilities.
The GigaGuard controller automatically interrupts gas flow and initiates a shutdown in the event of a sensor alarm trip, while an Emergency Shutoff (EMO) button offers immediate manual operator shutdown. LED lights display the systems’ status, while an audible alarm accompanies flashing lights alerting the operator should a hazardous condition occur.
Each system is CE certified and is manufactured with ultra-high purity components to guarantee long term, reliable and consistent service. The system features pneumatically operated valves, Magnehelic and pressure switch exhaust monitoring as well as an optional point- of-use mass flow controller box with heated low vapour pressure mass flow controllers.
To guard against undesirable process gas liquefaction and to help sustain the system’s cylinder temperatures and flowrates, VaporX is designed with an integrated fully automatic multi-zone heat control package which includes process gas cylinder heating blankets, gas manifold heat tracing, and process gas line heat
October 2013
www.compoundsemiconductor.net 129
He adds, “As with all our Xturion systems, VaporX is engineered to be flexible, offering many additional mechanical, electrical and enclosure features to meet each customer’s exact needs. We constantly strive to provide our customers with top quality customised products they have come to trust from SEMI-GAS Systems.”
Riber half yearly revenues plunge 17 percent
The firm received many of its orders from Research laboratories
Riber, a manufacturer of MBE reactors used in the growth of III-V semiconductors, has released its earnings for the first half of 2013.
HALF-YEAR EARNINGS
Factoring in the change in revenues, the half-year gross margin was €2.2 million on June 30th, 2013 as compared to €2.8 million on June 30th, 2012, representing 28 percent of revenues. Provisioning for inventories led to a net charge of €0.2 million, identical to the half year ended June 30th, 2012.
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