PV PROCESSEQUIPMENT
SINGULUS TECHNOLOGIES AG / STANGL Semiconductor Equipment AG www.singulus.de
www.stangl.de
SOLUTUS - New Inline Multi Chamber System for
Thin-Film Solar Cells
STANGL and the Helmholtz Zentrum Berlin für Materialien und Energie (HZB) have developed a new process for application in the production of thin-film solar cells. This newly developed technology extends SINGULUS + STANGL's product portfolio. The so-called Spray Ion Layer Gas Reaction Process (ILGAR) is a new method for the production of thin-film solar cells, which was invented at and patented by HZB. The ILGAR process will be used for the application of indium sulfide buffer layers, which are capable of replacing cadmium sulfide in thin-film solar cells.
The spray technology is reproducible, fast and cost-efficient. The SOLUTUS multi chamber system for Spray Ion Layer Gas Reaction Process' (ILGAR) is a fully automated production line for single side coating of glass substrates, for CIS/CIGS or CdTe photovoltaic modules, with In2S3 or alternative buffer layers based on ILGAR process (APCVD) in inline operation. SINGULUS + STANGL will exclusively market the new production machine for ILGAR thin-film solar cells on glass and flexible materials.
Solar Metrology www.solarmetrology.com
38
In -Situ XRF Yield Management tool
Solar Metrology's System SMX-ISI is an in-situ x-ray fluorescence (XRF) metrology tool platform that provides composition and thickness measurements for thin film solar PV metal film stacks on flexible roll to roll substrates such as stainless steel, aluminium and polyimide or rigid substrates such as float glass. Typical measurement applications include Mo thickness and all CIGS combinations (including all CIG alloys and/or film combinations and final CIGS formulations).
SMX-ISI is fast, flexible and easily integrated into any vacuum deposition tool or vacuum process station or point of a vacuum process line. SMX-ISI utilizes X-ray fluorescence,
Camstar www.camstar.com
Camstar's SolarSuite is a rapid-deployment solution built on the Camstar Enterprise Platform.
A single Enterprise Platform to manage:
Wafer, Cell, Panel and Test Processes provides: Out-of-the-box Best Practices enable rapid deployment Proven ability to scale to high volume Top performance and reliability 24x7 Easy-to-use tools to accelerate wide user adoption.
Gain Instant Global Visibility across Lines, Plant, Enterprise:
Dashboard monitoring of KPIs like OEE, Cycle Times, Yields, WIP
Early warnings and actions triggered by process results Complete serialized cell traceability.
an enabling technology for CIGS manufacture, that delivers yield management and yield improvement by allowing in-situ process control.
The SMX-ISI tool Platform does not affect the process since all SMX-ISI tool components reside outside of vacuum for optimum performance and serviceability.
The SMX Measurement tool platform offers a production-ready suite of film thickness and composition measurement tools for research and process development, in-process monitoring and post-process quality control.
SolarSuite v4.3
Lower your cost of quality with focus on prevention through:
Collaborative design of products and processes Quality data collection, assessment and action Correlation of results to prior materials and processes Fast, easy, contextual root cause analysis Proactive remediation enforcement.
Replicate and enforce best known methods (BKM) with "Copy Smartly" across lines, plants, time zones Industry-standard integration with process control, equipment and testers
Enforced performance standards per IEC 61215 or IEC 61646.
www.solar-pv-management.com Issue II 2010
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