PV PROCESSEQUIPMENT
Oerlikon Systems www.oerlikon.com/systems/solaris
SOLARIS - Beyond Alternative Coating Options
Responding to the rapid shifts and emerging technologies in the world of high-tech manufacturing, the new Solaris platform aims at a wide range of new manufacturing processes with unprecedented process flexibility.
Various substrates
Wafers Glasses
Thin foils
Various applications Solar Cells Touch Panels Thermo Electric Generators Thin Film Batteries NEMS / Semiconductors
The Solaris is designed for front- and back side coating of crystalline silicon solar cells.
The Multi layer capability allows passivation and “silane free” SIN-AR (Anti Reflective) coating on the front side, with the freedom to select optical criteria’s (like refractive indices, etc.) of
individual layers as well as passivation and AI-contact layer deposition on the back side.
Quick change over from one substrate size to another due to carrier system
Substrate loading / unloading included in the machine design Small foot print and low operating costs Flexible configurations allowed - each process station is separated from the other
Multi layer capability - each chamber can operate different processes and deposit different materials
Multi Source Sputtering - alloy development with up to 4 different materials
High through put - up to 1.200 substrates / h (dry cycle time < 3.0 sec)
Substrate rotation during sputtering ensures ± 2% layer uniformity
Sputter chamber diameter up to 240mm Film annealing with carbon heater up to 400°C Surface cleaning and activation by etching E-asy integration into automated inline production systems.
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Rehm Thermal Systems GmbH www.rehm-group.com
Thermal Systems for the metallization
Rehm is an international supplier of soldering systems and thermal system solutions for the electronics industry an photovoltaic industries as well. We supply custom tailored solutions for a great variety of applications in modern electronics manufacturing with high precision, innovative, reliable systems and intelligent software. Furthermore Rehm offers the conception and development of these systems.
Thermal Systems for the metallization of solar cells: RDS Solar Dryer and RFS-D Fast Firing Systems
The RDS drying system for the metallization line cures the paste applied onto the silicon solar cells using screen printing technique.
The drying process consists of a combination of five IR zones an one central convection zone. Thus, the temperature profile can be adjusted exactly and flexible.
For an immediate further processing of the cells, these have to be cooled down gently. In order to achieve shorter cycle times, a triple lane operation is possible. In case of difficult drying processes with high quantity of contamination an optional condensation management system can be added.
Lowest breakage rate High throughput (up to 5700 pcs/h at triple lane transport) Divided transport (heating/cooling zone) Already 200 installed systems worldwide Optional condensate management
The new Rehm RFS-D Fast Firing Systems for typical mono- or multi-crystalline solar cell production convince because of their high quality and their modular construction enabling different line solutions.
Their maintenance friendly concept, the small energy consumption, the short production cycles and their intelligent software solution distinguish these top-quality systems for the metallization line. All systems are configured with short-wave IR radiators as well as with top and bottom heaters. This enables a metallization of the solar cells with unbeatable process stability. The burnout area of the firing oven can be fed with extra oxygen and the firing area with nitrogen.
Lowest breakage rate High throughput (up to 5700 pcs/h at triple lane transport) Low maintenance expense+ Highly efficient solar cells Exact temperature profiling
www.solar-pv-management.com Issue II 2010
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