PV PROCESSEQUIPMENT
RASIRC www.rasirc.com
Controlled delivery of ultrapure steam
The RASIRC Steamer provides controlled delivery of ultrapure steam from de-ionized (DI) water. Steam is used in the solar industry for growing passivation layers on crystalline solar cells. The application is wet thermal oxidation. As opposed to dry oxidation, wet oxidation decreases oxidation temperature and process time. Used for passivation layers, oxide layers can improve conversion efficiency above 20%. The direct purification of steam is an easy and cost effective way to introduce ultrapure water vapor into the oxidation tube. The Steamer has proven to increase oxide growth rate, chamber uniformity, film quality, and reduce operating costs when compared against all other steam technologies and is an excellent replacement for pyrolytic torches.
The Steamer reduces cost by elimination of hydrogen and oxygen to generate steam, equipment and overhead costs through improved growth rate and uniformity, material cost by processing at lower temperatures to enable thinner wafer and mc-silicon usage, and improves safety and reliability.
There is up to 18% improvement in growth rate by elimination of carrier gases such as hydrogen and oxygen and there is no thermal build up with increased flow rate. The flow rate is controlled by an internal flow meter. The Steamer generates positive pressure so no carrier gas is needed. Water levels are constantly monitored and adjusted to ensure continuous feed of steam.
Safety is a major benefit of the Steamer as it eliminates hydrogen and oxygen from the oxidation process, and thus flammable and explosive materials. In addition, it operates at significantly lower temperatures (below 125°C as opposed to above 500°C). RASIRC technology improves many processes within the solar industry such as passivation, interlayer oxide films, TCO, and backside thick oxide.
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SCHILLER AUTOMATION GmbH & Co. KG www.schiller-automation.com
TS3600 fully automated solar cell tester
The new TS 3600 from Schiller Automation is a fully automated solar cell tester and sorter. The integration of the TS 3600 into the production line is absolutely flexible. The whole logistic concept is based on the idea of soft handling, in this way they guarantee a high yield for the system.
The TS 3600 consist of three main modules, namely the loader, the tester and the sorter module. In the loader the cells may arrive on transport belts, in boxes or in band magazines (our standard configuration). The magazines are automatically brought to their unloading position and emptied by a pick and place handling. A vision system determines the position in space and guarantees a precisely positioning.
The main part of the machine is the tester with our robust and reliable handling systems which assure a high uptime of the machine. The transport system utilizing a revolving chain equipped with wafer grippers. This transport system ensures a
continuous and reproducible transport of the cells from one test position to the other. In this way it greatly reduces the amount of pseudo-error measurements. The current configuration features four different measurement positions which can be equipped to the customers' needs.
The standard configuration consists of a visual inspection of the front and backside, a sun simulator and optionally an EL/PL tool. We have put special attention to the contacting of the cells in the simulator. A guided soft contacting with a minimum of force on the contacts allows for the highest precision of the power measurement.
The third module is the sorter having 55 bins which can be split in 48 classes. The bins are equipped with carriers which are automatically loaded and unloaded. The modular system is configurable in terms of throughput, grade of automation and measurement systems.
www.solar-pv-management.com Issue II 2010
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