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21

LayTec GmbH www.laytec.de

SolR

LayTec develops, manufactures and markets optical in-situ and in-line metrology systems for thin-film processes with particular focus on compound semiconductor and photovoltaic applications. Advanced use of measurement techniques such as reflectometry, emissivity corrected pyrometry, laser deflectometry, reflectance anisotropy spectroscopy are uniquely combined to create our series of products. LayTec’s metrology provides access to all key thin-film parameters in real-time – either during the deposition process or in-line. In 2009 LayTec launched its first in-line monitoring system for photovoltaic thin- film applications – SolR. SolR provides a unique approach to monitoring thin-film PV processes that greatly improves traditional off-line and batch sampling methods. It is an in-line system that is capable of measuring the properties and thickness of all layers – transparent conducting oxide (TCO), absorber and buffer layers – throughout the complete solar cell manufacturing process.

SolR provides in-line access to key thin-film process parameters:  in-line film thickness measurements of all layers including semiconducting, dielectric and organic films

 TCO conductivity fingerprints  separation of refractive index and film thickness for SiNx layers

 on-line process homogeneity checks  roughness & texture characterization for c-Si, poly-Si and TCO  in-line haze measurements of TCOs

The company is now cooperating with numerous partners to further develop cutting edge in-situ and in-line metrology solutions for the complete range of photovoltaic thin-film processes. With our thin-film PV-cell in-line products producers have realized a lot of benefits: production anomalies are quickly identified and corrected, development cycles are accelerated, transfer and ramp up of established processes to new lines are facilitated and conditions are easily re-established after maintenance. This all adds up to greater yields and reduced costs – the most important factor in today’s PV cell production!

For more

information please visit www.laytec.de or contact

info@laytec.de

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