May/June, 2012
www.us-tech.com
Thornwood, NY — Carl Zeiss has launched the AURIGA Laser, an advanced system combining the spe-
New Laser Ablation from Carl Zeiss
applying a focused ion beam — is inefficient, because the process is much too slow. Ablation with a pulsed micro-
focus laser beam offers clear advan- tages: it does not damage the sample, and it enables ablation rates compa- rable to mechanical removal. The scanning laser used in this unique solution is a nanosecond pulsed, diode-pumped solid-state laser oper- ating at 355 nm provided by TRUMPF AG (Ditzingen, Germany). It was chosen to optimally meet the demands of preparing structures for SEM examination. In cooperation with Carl Zeiss, researchers from the Fraunhofer-Institute for Non- destructive Testing in Dresden have optimized the workflow of the tool for ease of use, fast transfer procedures,
and fast relocation of the region of interest on the sample under exami- nation. In order to protect the AURIGA
FIB-SEM workstation and detectors from debris generated during the laser ablation process, the system is equipped with a separate chamber for laser operation. After preparing the structure of interest with the laser, the sample is transferred under vacuum conditions to the main chamber for SEM examination or FIB polishing. Retrieving the target structure is achieved automatically. The transfer is carried out quickly and smoothly in a matter of seconds — resulting in a very simple and con- tinuous workflow. To realize specific ablation patterns, the laser is equipped with CAD software control-
Page 93
ling the scanner head. This enables the user to pre-define even highly complex patterns of the sample structure. The system enables the users to
carry out new applications and to examine complex structures like next-generation nano-technology processors or flexible thin film solar cells.
Future applications include
semiconductor manufacturing, photo- voltaics, polymer electronics, joining and contacting technologies, oil and gas prospection, geomechanical con- sulting, pharmaceuticals, life sciences
and materials research in general. Contact: Carl Zeiss Microscopy,
LLC, One Zeiss Drive, Thornwood, NY 10594 % 914-747-1800 Web:
www.zeiss.com/micro
New laser offers optimum ablation capabilities.
cific advantages of the AURIGA CrossBeam (FIB-SEM) workstation with the capabilities of a pulsed micro-focus laser for fast ablation of material. The AURIGA Laser is particu-
larly useful for the examination of samples where the target structure is deeply buried under material lay- ers. To gain access to the target structure this material needs to be removed, a procedure which is diffi- cult to conduct with conventional techniques. Mechanical ablation and cross-sectioning of large material vol- umes often cause deformations, mak- ing the sample unsuitable for further examination. Another approach —
IAC Industries: Ergonomic
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trum of industries. Contact: IAC Industries, Inc.,
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