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March, 2020


www.us-tech.com


CyberOptics Corporation Introduces Inline Particle Sensor


Minneapolis, MN — CyberOptics Corporation has introduced its new inline particle sensor (IPS) with CyberSpectrum™ for semiconductor tool set-up and equipment diagnostics. An extension of the in- dustry-leading WaferSense® and ReticleSense® airborne particle sensor (APS) technology, the new IPS detects particles in gas and vacuum lines 24/7 in semiconductor process equipment. The IPS quickly identifies, monitors and en-


ables troubleshooting of particles down to 0.1 µm. The IPS can be installed in any gas or vacuum sys- tem and is particularly useful for EUVL tools, where the ability to monitor particles inline can significant- ly improve EUVL tool yield and productivity. For example, it can be installed at the vacu-


um line in between the EUV process chamber and the vacuum pump, saving significant time compared with current methods, such as sending a monitor dummy reticle into the EUV system to check


TRI Unveils Multicore ICT Solution for LED Lighting


San Jose, CA — Test Research, Inc., (TRI) has launched its TR5001 SII LED series. The series is the compa- ny’s latest ICT and FCT innovation dedicated to LED lighting tests. The ICT and FCT solution offers


advanced performance Multicore Par- allel testing with up to four independ- ent cores, and a durable quick discon- nect interface (QDI), together with built-in auto calibration and self-diag- nostics ensure long-term testing relia- bility. Among its many innovative fea-


INNOVATION IS IN OUR DNA


for particles before and after sending the reticle into the EUVL. The IPS is always on and collect-


ing particle data, which is especially critical dur- ing chamber purging. Process and equipment engineers in semicon-


ductor fabs can speed equipment qualification with real-time, 24/7 monitoring, compare past and pres- ent data, as well as from one tool to another. Contamination sources can be identified


quickly and the effects of cleaning, adjustments and repairs can be seen in real time. Fabs can shorten equipment maintenance cycles, lower equipment expenses and optimize preventive


maintenance plans. Contact: CyberOptics, Corp., 5900 Golden


Inline particle sensor with CyberSpectrum software.


Hills Drive, Minneapolis, MN 55416 %952-820-5837 E-mail: cfuranna@cyberoptics.com Web: www.cyberoptics.com


Page 27


New innovative 3D AOI with excellent ROI


TR5001 SII LED series multicore ICT system.


tures, the TR5001 SII LED series in- troduces an all-new LED analyzer, which offers multiple simultaneous LED testing for color and brightness, for up to 1,080 LED channels. The rapid surge of emerging


LED markets, such as automotive, raises the demand for faster and more accurate testing alternatives. The TR5001 SII LED series reduces the workload of operators by reduc- ing operators’ re-inspection. The cost of new product development and in- troduction will significantly de- crease, because of how flexible and cost-effective the deployment of test


programs and fixtures are. Contact: Test Research USA,


Inc., 832 Jury Court, Suite 4, San Jose, CA 95112 % 408-567- 9898 E-mail: triusa@tri.com.tw Web: www.tri.com.tw


Our new S3088 DT system guarantees the highest throughput and inspection quality for high and low mix electronic assembly lines. Thanks to the unique compact design our latest innovation enables cost-effective quality assurance and dual-track operation with smallest footprint. In addition to 3D AOI tasks, configurations are available as 3D SPI, CCI or UFI. Various interfaces allow for seamless integration into a Smart Factory environment.


WINNER


3D SPI 3D AOI 3D AXI 3D MXI 3D Bond


CCI


www.viscom.com


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