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tion of better than 100 micro- rads. The feet are supplied with compressed air for lateral fine alignment (yaw) and therefore float on air cushions. Triangu - lation sensors help with setting the air cushions. Despite the heavy weight, it is possible to move the system to another loca- tion easily. For this purpose, the
machine’s feet are retracted, the hoverpads activated, and MiQA can literally float to a new loca- tion. To simplify the move, there is also a common electrical inter- face on the base of the machine that is available to the entire measuring system for the higher level beamline control. The base of the machine is
designed for positioning a maxi- mum of six X-ray optical ele- ments. For the highest flexibility,
Hexapods are the driving force behind the precise positioning of the X-ray lenses and grids in six degrees of freedom.
each element is placed on its own positioning module, which can move along the path of the beam on massive, parallel rails inde- pendently of the other modules. Four further modules serve
to position the X-ray lenses and grids. Hexapods are the driving force here for precision align- ment in six degrees of freedom. Because hexapods are parallel- kinematic systems, the center of rotation can be set as desired by software commands in order to adapt the focus of the X-ray opti- cal element. This accelerates the alignment process considerably. Two of these optical X-ray mod- ules are also equipped with goniometers and piezo scanners to allow a large range of angular motion around the axis of the beam as well as nanometer-pre- cision phase scanning of, for example, X-ray grids. They can be attached to all of the hexapods if necessary.
Positioning the Sample The detector portal module
positions the camera with the detector optics in three degrees of freedom. A parallel-kinematic system also guarantees high stiffness and stability. It provides two lateral
degrees of freedom perpendicu- lar to the beam and one degree of rotational freedom around the beam axis. The center of rotation can also be set as desired by soft- ware to adapt it to the detector geometry. Because the detector used by the KIT is large and heavy, the parallel-kinematic system was constructed so that
See at SMTA Guadalajara, Booth 1018, The Battery Show, Booth 5025 and SEMICON West, Booth 5756
high precision is ensured and at the same time, high stability. The heart of the system is
the sample module, which allows various experimental schemes. It is also designed for high stiff- ness, stability, and precision. A hexapod, a goniometer, as
rotational axis with air bearing, and a three-axis NEXLINE PiezoWalk nano-positioner are stacked on top of each other. The heavy-duty hexapod allows alignment in six degrees of free- dom with any center of rotation. In addition to the sample, it was also necessary to consider that
positioning devices with a weight 551 lb (250 kg) have to be moved. Such a load inevitably leads to
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Nano-Scale Motion Control: 20 Tons of Positioning Tech... Continued from previous page
deformation of the joints and this makes submicrometer repeata- bility impossible. To overcome this challenge, six additional and unloaded struts equipped with absolute encoders were used only for measuring the position of the uppermost platform. A separate outer servo loop
then compensates any deforma- tion of the hexapod’s drive struts based on the data collected by the measuring legs. The hexa- pod’s repeatability is better than 100 nanometers. The large goniometer on the
High-load hexapod. Continued on next page
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