FEATURE MEMS
Spinning out the support technologies amidst the MEMS revolution
processing, these encoders can deliver maximum performance in a small lightweight package.
These encoders offer up to 5nm resolution
with all interpolation, AGC (automatic gain control) and signal processing performed in the sensor head. No additional PCBs, adapters, or dongles are required for operation. There are three mounting options – industry standard analogue and digital incremental encoder outputs and standard FFC (flat flexible cable) connector. These devices are engineered to deliver low power consumption. A 3.3VDC version is offered, making it ideal for battery-powered precision instruments. The benefits include: miniature footprint,
MEMS technology has been reducing mechanical devices, such as sensors and actuators, to pin-head size and this revolution is set to continue. Gerard Bush of INMOCOcomments on these technical advances, but is even more excited by the thought of transferring some of the support technologies to other areas of engineering and industry
M
icro-Electro-Mechanical Systems (MEMS), vary in size from submicron
to several millimetres and are made using microfabrication techniques. Despite their tiny size some microsensors and microactuators are complicated mechanisms with a number of moving parts controlled by integrated microelectronics. Microsensors have been developed that measure temperature, pressure, inertia, magnetic force, radiation, chemicals, etc., and their performances can often match or exceed the accuracy of full-scale sensors. MEMS are manufactured using batch
fabrication techniques developed in the integrated circuit industry. This means they can be made with fully integrated control electronics and, when produced in bulk, unit costs become very low while performance levels can be very high. Not surprisingly then, growth in the use of MEMS is accelerating rapidly. Current areas of usage of microsensors
include blood pressure sensors for use in IV lines and to measure a babies’ vital signs during birth for example, respiratory monitoring in ventilators, blood analysis, accelerometers and gyroscopes for use in airbags, mobile phones and handheld computer games consoles. MEMS microactuators are used to create
24 SUMMER 2015 | MICROMATTERS
micro-valves and pumps for use with gas and liquid flows, optical switches and mirrors for use with lasers and even micro-flaps capable of steering aircraft. The fundamental technology of MEMS is
still developing, so in the future we can look forward to greater levels of integration with, for instance, multifunction MEMS. In these microsensors, actuators and control electronics will be combined with photonics, nanotechnology, etc., on a single substrate to create truly ‘smart’ products.
MAKING MEMS As the manufacture of MEMS is closely related to the manufacture of integrated circuits or silicon chips, the production process is already well developed and is supported by a range of production equipment and products. Many of these products are sensors capable of measuring down to nanometre levels of resolution and have also found use beyond silicon processing. An example of such sensors areMicroE’s Optira series of encoders, available in the UK through Daventry-based INMOCO. By combining the company’s PurePrecision technology with state-of-the-art electronics and signal
Figure 1:
MicroE’s Optira series of encoders, available in the UK through Daventry- based Inmoco
interpolation and AGC in the sensor head. There are mechanical and PCB-mount options to ensure ease of installation, while the FFC enables simple and flexible cabling/connectivity. There is also an optional connector board for index calibration and connector flexibility plus a status LED in the sensor head. Durability has been designed into the encoders on both mechanical and electrical fronts and multiple linear and rotary grating/scale options mean they can be used in a wide range of applications. Miniature encoders and other sensors,
“Microsensors
and microactuators are complicated
mechanisms with a number of moving parts controlled by integrated
microelectronics ...”
originally developed for producing MEMS and integrated circuits, are now being specified in many other fields. These include the manufacture of precision instruments, avionics, medical equipment, mobile devices, satellites and military hardware. Recent advancements in technology have redefined precision motion engineering. The development of MEMS and greater integration between systems has helped end users achieve cost effective and efficient process performance while attaining very high accuracy. Ultimately,
INMOCO supplied products such as MicroE’s
Optira encoder range are facilitating the constant technological advancement that is now offering end users
small highly reliable solutions in order
to optimise large processing challenges. Inmoco
www.inmoco.co.uk 01327 307600
/ MICROMATTERS
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