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APC-FOR A CLOSER


See us at SEMICON Europa, Oct 7-9, Booth #815


From “in situ” electrical and stress measurement to optical pyrometry and broadband optical monitoring, Evatec’s Advanced Process Control (APC) technologies for evaporation and sputter enable new levels of throughput and yield for the lowest cost of ownership in deposition of metals, TCOs and dielectrics.


To find out more about APC on our BAK Evaporation and Radiance Sputter Cluster platforms visit www.evatecnet.com or contact your local agent.


LEDs • POWER DEVICES • TELECOMS • PHOTOVOLTAICS • MEMS • www.evatecnet.com MORE INFO


LOOK AT YOUR THIN FILM DEPOSITION


EVATEC - THE THIN FILM POWERHOUSE


High-end valves for MOCVD Transfer valves and gates


with L-MOTION and MONOVAT technology


Withstand full atmospheric differential pressure and contaminating processes


Designed for high cycle life and high temperature applications


Butterfly control valves L-MOTION


MONOVAT


Emergency door locking and pressure control Sizes up to 100 × 800 mm (4" × 32")


www.vatvalve.com


High pressures with low flows


Wide range of interfaces, sizes and heated and non-heated versions


Withstand full atmospheric differential pressure and contaminating processes


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