September 2026
www.us -
tech.com Sono-Tek to Highlight Ultrasonic Photoresist Coating System
MILTON, NY — Sono-Tek Corporation is high- lighting its SPT200WS automated ultrasonic photoresist coating system with a new dedicated post-coat soft-bake heat plate option at SEMI- CON West 2026. The SPT200WS com- bines Sono-Tek’s precision ultrasonic spray-coat- ing technology with automated wafer handling for semiconductor applications, including MEMS and wafers with deep-well or other challenging topographies. The system sup ports 100, 150 and 200 mm
wafers, with a 300 mm configuration available. The new post-coat heat plate is designed
to increase system throughput by separating the photoresist coating and drying pro cesses. After a wafer is coated inside the SPT200 coating module, the au- tomated wafer handler trans fers it to the dedicated heat plate for a controlled post-coat bake. Previously, the coated wafer
could remain on the heated chuck inside the coating station for an extended period while the photore-
Intepro: 4U Programmable DC Power
Supply TUSTIN, CA — Intepro Systems is now offering the Ainuo ANEVH(F) series of programma- ble DC power supply/load offer- ing models with power ratings from 5 kW to 30 kW in 3U, to in- dustry-leading 50 kW in a 4U rack-mounted package. The ANEVH(F) series is a program- mable DC power supply that in- tegrates DC power and feedback load. It can function as a source that outputs power to the outside world. It also functions as a sink that absorbs power and returns it cleanly to the grid to achieve true bidirectional operation. By combining programmable-source and regenerative-programmable- load features into one chassis, the ANEVH(F) series frees up rack space and reduces generat- ed heat, all while recovering load energy back to the grid. The ANEVH(F) Series of bidi-
rectional programmable DC test power supplies includes seven (7) voltage levels covering a voltage range from 0V to 2,250V, supports the parallel operation of multiple units, and is expandable up to 1 MW in maximum power. The pow- er supply’s energy flows bidirec- tionally with automatic seamless switching. It offers high power density, fast dynamic response,
and built-in function generators. Contact: Intepro Systems,
14662-E Franklin Avenue,
Tustin, CA 92780 % 714-953-2686 E-mail:
sales@inteproate.com Web:
www.inteproate.com
SPT200WS photoresist coating system.
sist dried. With the new option, the post-coat soft bake takes place at a separate station, freeing the coating module to begin processing the next wafer sooner. This parallel-processing approach can reduce overall cycle time and increase wafer throughput without sacrificing coating consis-
tency or process control. Contact: Sono-Tek Corp., 2012 Route 9W,
Milton, NY 12547 % 845-795-2020 E-mail:
info@sono-tek.com Web:
www.sprayfluxing.com
See at SEMICON West, Booth 468
Page 59
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